Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

Ya Ting Chien; Hong Yi Tu; Wen Chung Chen; Yu Zhe Zheng; Sheng Yao Chou; Pei Jun Sun; Xin Ying Tsai; Liu Wen Chang; Ming Chi Chou; Tsung Ming Tsai

doi:10.1016/j.mssp.2023.107343

Performance improvement of Zn_0.5Mg_0.5O UV sensor by supercritical fluid technology

Ya Ting Chien
, Hong Yi Tu
, Wen Chung Chen
, Yu Zhe Zheng
, Sheng Yao Chou
, Pei Jun Sun
, Xin Ying Tsai
, Liu Wen Chang
, Ming Chi Chou
, Tsung Ming Tsai

Program on Key Materials

Research output: Contribution to journal › Article › peer-review

Abstract

Supercritical carbon dioxide (SCCO₂) fluids technology is utilized to improve the performance of Zn_0.5Mg_0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO₂ fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO₂ fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO₂ fluids to improve the performance of MSM-type Zn_0.5Mg_0.5O DUV sensor at low temperatures.

Original language	English
Article number	107343
Journal	Materials Science in Semiconductor Processing
Volume	158
DOIs	https://doi.org/10.1016/j.mssp.2023.107343
Publication status	Published - 2023 May

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.mssp.2023.107343

Cite this

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title = "Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology",

abstract = "Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO2 fluids to improve the performance of MSM-type Zn0.5Mg0.5O DUV sensor at low temperatures.",

author = "Chien, \{Ya Ting\} and Tu, \{Hong Yi\} and Chen, \{Wen Chung\} and Zheng, \{Yu Zhe\} and Chou, \{Sheng Yao\} and Sun, \{Pei Jun\} and Tsai, \{Xin Ying\} and Chang, \{Liu Wen\} and Chou, \{Ming Chi\} and Tsai, \{Tsung Ming\}",

note = "Publisher Copyright: {\textcopyright} 2023 Elsevier Ltd",

year = "2023",

month = may,

doi = "10.1016/j.mssp.2023.107343",

language = "English",

volume = "158",

journal = "Materials Science in Semiconductor Processing",

issn = "1369-8001",

publisher = "Elsevier Limited",

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TY - JOUR

T1 - Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

AU - Chien, Ya Ting

AU - Tu, Hong Yi

AU - Chen, Wen Chung

AU - Zheng, Yu Zhe

AU - Chou, Sheng Yao

AU - Sun, Pei Jun

AU - Tsai, Xin Ying

AU - Chang, Liu Wen

AU - Chou, Ming Chi

AU - Tsai, Tsung Ming

PY - 2023/5

Y1 - 2023/5

N2 - Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO2 fluids to improve the performance of MSM-type Zn0.5Mg0.5O DUV sensor at low temperatures.

AB - Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO2 fluids to improve the performance of MSM-type Zn0.5Mg0.5O DUV sensor at low temperatures.

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UR - https://www.scopus.com/pages/publications/85147325065#tab=citedBy

U2 - 10.1016/j.mssp.2023.107343

DO - 10.1016/j.mssp.2023.107343

M3 - Article

AN - SCOPUS:85147325065

SN - 1369-8001

VL - 158

JO - Materials Science in Semiconductor Processing

JF - Materials Science in Semiconductor Processing

M1 - 107343

ER -

Performance improvement of Zn_0.5Mg_0.5O UV sensor by supercritical fluid technology

Abstract

All Science Journal Classification (ASJC) codes

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