Periodic and metallic nano-structures patterned by contact transfer lithography with application on localized surface plasmon resonance

Hao Yuan Chung, Chun Ying Wu, Yung-Chun Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we demonstrate a rapidly, low cost, and mass production process to fabricate arrayed metallic nanoparticles on a variety of substrates based on contact transfer and metal mask embedded lithography (CMEL). A hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittance measurements that noble metallic arrayed nanoparticles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range, and is in good agreement with the simulated results using finite-element method (FEM). It is found that the narrowband extinction spectrum is associated with electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces significant plasmon resonance in the ITO layer underneath the arrayed metallic nanostructures. Based on this observed phenomenon and our innovative large-area nano-fabrication processes, optoelectronic devices with arrayed metallic nanostructures can be easily designed and developed.

Original languageEnglish
Title of host publicationPHOTOPTICS 2015 - 3rd International Conference on Photonics, Optics and Laser Technology, Proceedings
PublisherSciTePress
Pages20-25
Number of pages6
Volume1
ISBN (Electronic)9789897580925
Publication statusPublished - 2015
Event3rd International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2015 - Berlin, Germany
Duration: 2015 Mar 122015 Mar 14

Other

Other3rd International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2015
CountryGermany
CityBerlin
Period15-03-1215-03-14

Fingerprint

ITO (semiconductors)
surface plasmon resonance
lithography
nanoparticles
narrowband
electromagnetic fields
extinction
glass
nanofabrication
optoelectronic devices
periodic variations
transmittance
finite element method
masks
metals

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Chung, H. Y., Wu, C. Y., & Lee, Y-C. (2015). Periodic and metallic nano-structures patterned by contact transfer lithography with application on localized surface plasmon resonance. In PHOTOPTICS 2015 - 3rd International Conference on Photonics, Optics and Laser Technology, Proceedings (Vol. 1, pp. 20-25). SciTePress.
Chung, Hao Yuan ; Wu, Chun Ying ; Lee, Yung-Chun. / Periodic and metallic nano-structures patterned by contact transfer lithography with application on localized surface plasmon resonance. PHOTOPTICS 2015 - 3rd International Conference on Photonics, Optics and Laser Technology, Proceedings. Vol. 1 SciTePress, 2015. pp. 20-25
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Chung, HY, Wu, CY & Lee, Y-C 2015, Periodic and metallic nano-structures patterned by contact transfer lithography with application on localized surface plasmon resonance. in PHOTOPTICS 2015 - 3rd International Conference on Photonics, Optics and Laser Technology, Proceedings. vol. 1, SciTePress, pp. 20-25, 3rd International Conference on Photonics, Optics and Laser Technology, PHOTOPTICS 2015, Berlin, Germany, 15-03-12.

Periodic and metallic nano-structures patterned by contact transfer lithography with application on localized surface plasmon resonance. / Chung, Hao Yuan; Wu, Chun Ying; Lee, Yung-Chun.

PHOTOPTICS 2015 - 3rd International Conference on Photonics, Optics and Laser Technology, Proceedings. Vol. 1 SciTePress, 2015. p. 20-25.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - In this study, we demonstrate a rapidly, low cost, and mass production process to fabricate arrayed metallic nanoparticles on a variety of substrates based on contact transfer and metal mask embedded lithography (CMEL). A hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittance measurements that noble metallic arrayed nanoparticles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range, and is in good agreement with the simulated results using finite-element method (FEM). It is found that the narrowband extinction spectrum is associated with electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces significant plasmon resonance in the ITO layer underneath the arrayed metallic nanostructures. Based on this observed phenomenon and our innovative large-area nano-fabrication processes, optoelectronic devices with arrayed metallic nanostructures can be easily designed and developed.

AB - In this study, we demonstrate a rapidly, low cost, and mass production process to fabricate arrayed metallic nanoparticles on a variety of substrates based on contact transfer and metal mask embedded lithography (CMEL). A hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittance measurements that noble metallic arrayed nanoparticles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range, and is in good agreement with the simulated results using finite-element method (FEM). It is found that the narrowband extinction spectrum is associated with electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces significant plasmon resonance in the ITO layer underneath the arrayed metallic nanostructures. Based on this observed phenomenon and our innovative large-area nano-fabrication processes, optoelectronic devices with arrayed metallic nanostructures can be easily designed and developed.

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Chung HY, Wu CY, Lee Y-C. Periodic and metallic nano-structures patterned by contact transfer lithography with application on localized surface plasmon resonance. In PHOTOPTICS 2015 - 3rd International Conference on Photonics, Optics and Laser Technology, Proceedings. Vol. 1. SciTePress. 2015. p. 20-25