Peristaltic micropump system with piezoelectric actuators

Ling Sheng Jang, Yung Chiang Yu

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)


This work presents a driving system for a peristaltic micropump that is based on piezoelectric actuation. The effects of the actuation sequence on pump performance are also considered. A valveless peristaltic micropump based on piezoelectric actuation is designed and fabricated using microelectromechanical system technology. The pump has three parts - silicon, Pyrex glass and commercially available bulk PZT (lead zirconate titanate) chips. The peristaltic micropump actuated by PZT chips comprises three chambers that are in series. The driving system consists of an ATmega 8535 microprocessor, a high voltage power supply, three differential amplifiers, a phase controller, an A/D converter, a 555 oscillator and an LCD module. It is supplied via a 110 Vrms 60-Hz AC line and is programmable. The system can produce step-function signals with voltages of up to 100 Vpp and frequencies ranging from 10 Hz to 1 kHz, as the inputs for the pump. Fluid pumping with air is successfully demonstrated. Additionally, 3-, 4- and 6-phase actuation sequences for the pump are designed and used to study the effects on pump performance, as revealed by the flow rate and the displacement of a pump diaphragm. The experimental results show that the flow rate and the displacement of the diaphragm actuated by the 4-phase sequence exceed those actuated by the 3- and 6-phase sequences. A flow rate of 17.6 μl min-1 and a displacement of 2.91 μm (peak-to-peak) in 4-phase peristaltic motion are achieved at 100 Hz and 100 Vpp. The results demonstrate that the pump actuated in the 4-phase sequence is the most efficient. Consequently, the actuation sequences can affect the pump performance.

Original languageEnglish
Pages (from-to)241-248
Number of pages8
JournalMicrosystem Technologies
Issue number2
Publication statusPublished - 2008 Feb

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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