Abstract
Reducing contamination level is of primary importance for the safety and efficiency of a MOCVD process. Off-line fault identification is one of the basic tasks that must be performed in hazard analysis to identify potential operational problems. For illustration convenience, the scope of present study is limited to the purge-gas purifier of the process. A systematic step-by-step procedure is proposed in this paper to construct Petri nets for modeling the purification system. Efficient hazard assessment studies have been performed by simulating the fault propagation behaviors on the basis of the system model. A comprehensive list of possible fault origins has been thoroughly examined to demonstrate the effectiveness of the proposed approach.
| Original language | English |
|---|---|
| Pages (from-to) | 356-371 |
| Number of pages | 16 |
| Journal | Computers and Chemical Engineering |
| Volume | 35 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2011 Feb 9 |
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All Science Journal Classification (ASJC) codes
- Chemical Engineering(all)
- Computer Science Applications
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Petri-net models for comprehensive hazard analysis of MOCVD processes. / Chung, Li Ping; Chang, Chuei-Tin.
In: Computers and Chemical Engineering, Vol. 35, No. 2, 09.02.2011, p. 356-371.Research output: Contribution to journal › Article
TY - JOUR
T1 - Petri-net models for comprehensive hazard analysis of MOCVD processes
AU - Chung, Li Ping
AU - Chang, Chuei-Tin
PY - 2011/2/9
Y1 - 2011/2/9
N2 - Reducing contamination level is of primary importance for the safety and efficiency of a MOCVD process. Off-line fault identification is one of the basic tasks that must be performed in hazard analysis to identify potential operational problems. For illustration convenience, the scope of present study is limited to the purge-gas purifier of the process. A systematic step-by-step procedure is proposed in this paper to construct Petri nets for modeling the purification system. Efficient hazard assessment studies have been performed by simulating the fault propagation behaviors on the basis of the system model. A comprehensive list of possible fault origins has been thoroughly examined to demonstrate the effectiveness of the proposed approach.
AB - Reducing contamination level is of primary importance for the safety and efficiency of a MOCVD process. Off-line fault identification is one of the basic tasks that must be performed in hazard analysis to identify potential operational problems. For illustration convenience, the scope of present study is limited to the purge-gas purifier of the process. A systematic step-by-step procedure is proposed in this paper to construct Petri nets for modeling the purification system. Efficient hazard assessment studies have been performed by simulating the fault propagation behaviors on the basis of the system model. A comprehensive list of possible fault origins has been thoroughly examined to demonstrate the effectiveness of the proposed approach.
UR - http://www.scopus.com/inward/record.url?scp=78651434934&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78651434934&partnerID=8YFLogxK
U2 - 10.1016/j.compchemeng.2010.05.006
DO - 10.1016/j.compchemeng.2010.05.006
M3 - Article
VL - 35
SP - 356
EP - 371
JO - Computers and Chemical Engineering
JF - Computers and Chemical Engineering
SN - 0098-1354
IS - 2
ER -