Photo-electrical properties of MgZnO thin-film transistors with high-k dielectrics

Jyun Yi Li, Sheng Po Chang, Ming Hung Hsu, Shoou Jinn Chang

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


In this letter, magnesium zinc oxide (MgZnO) was deposited to fabricate a thin-film transistor (TFT) by radio-frequency magnetron sputtering. We used alumina as MgZnO TFT gate insulator layer via an atomic layer deposition method. The MgZnO TFT with Al2O3 insulator could exhibit a mobility of 7.73 cm2/Vs, threshold voltage of 4.2 V, and subthreshold swing of 0.29 V/decade. Compared with our previous published study, the current switching ratio was improved by nearly two orders of magnitude. Furthermore, the hysteresis phenomenon had been investigated and the results showed that the high-k gate insulator could improve the interface state caused by the traps.

Original languageEnglish
Pages (from-to)59-62
Number of pages4
JournalIEEE Photonics Technology Letters
Issue number1
Publication statusPublished - 2018 Jan

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


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