Photo-electronic properties of titanium dioxide nano thin films

Sheng Lung Tu, Yen-Hsun Su, Yun-Hwei Shen, Dah Tong Ray, Yu-chun Wu, Tao Hsing Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, nano-titanium films of different thickness were deposited. By adjusting it is found that when the thickness of the titanium films was in the nano-scale, the electric resistivity of the titanium films decreased. Furthermore, the deposited titanium was transformed into titanium oxide by maintain an oxygen atmosphere and using a rapid annealing furnace during sputtering. When oxidized nano titanium film is sputtered on a low-electric-resistive metal thin film, the photo-electronic properties of Nano-thin film will be enhanced.

Original languageEnglish
Title of host publicationApplied Science and Precision Engineering Innovation
Pages50-54
Number of pages5
DOIs
Publication statusPublished - 2014 Jan 1
EventInternational Applied Science and Precision Engineering Conference 2013, ASPEC 2013 - NanTou, Taiwan
Duration: 2013 Oct 182013 Oct 22

Publication series

NameApplied Mechanics and Materials
Volume479-480
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

OtherInternational Applied Science and Precision Engineering Conference 2013, ASPEC 2013
CountryTaiwan
CityNanTou
Period13-10-1813-10-22

Fingerprint

Electronic properties
Titanium dioxide
Titanium
Thin films
Titanium oxides
Electric conductivity
Sputtering
Furnaces
Annealing
Oxygen
Metals

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Tu, S. L., Su, Y-H., Shen, Y-H., Ray, D. T., Wu, Y., & Chen, T. H. (2014). Photo-electronic properties of titanium dioxide nano thin films. In Applied Science and Precision Engineering Innovation (pp. 50-54). (Applied Mechanics and Materials; Vol. 479-480). https://doi.org/10.4028/www.scientific.net/AMM.479-480.50
Tu, Sheng Lung ; Su, Yen-Hsun ; Shen, Yun-Hwei ; Ray, Dah Tong ; Wu, Yu-chun ; Chen, Tao Hsing. / Photo-electronic properties of titanium dioxide nano thin films. Applied Science and Precision Engineering Innovation. 2014. pp. 50-54 (Applied Mechanics and Materials).
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Tu, SL, Su, Y-H, Shen, Y-H, Ray, DT, Wu, Y & Chen, TH 2014, Photo-electronic properties of titanium dioxide nano thin films. in Applied Science and Precision Engineering Innovation. Applied Mechanics and Materials, vol. 479-480, pp. 50-54, International Applied Science and Precision Engineering Conference 2013, ASPEC 2013, NanTou, Taiwan, 13-10-18. https://doi.org/10.4028/www.scientific.net/AMM.479-480.50

Photo-electronic properties of titanium dioxide nano thin films. / Tu, Sheng Lung; Su, Yen-Hsun; Shen, Yun-Hwei; Ray, Dah Tong; Wu, Yu-chun; Chen, Tao Hsing.

Applied Science and Precision Engineering Innovation. 2014. p. 50-54 (Applied Mechanics and Materials; Vol. 479-480).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Tu SL, Su Y-H, Shen Y-H, Ray DT, Wu Y, Chen TH. Photo-electronic properties of titanium dioxide nano thin films. In Applied Science and Precision Engineering Innovation. 2014. p. 50-54. (Applied Mechanics and Materials). https://doi.org/10.4028/www.scientific.net/AMM.479-480.50