Photo-electronic properties of titanium dioxide nano thin films

Sheng Lung Tu, Yen Hsun Su, Yun Hwei Shen, Dah Tong Ray, Yu Chun Wu, Tao Hsing Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, nano-titanium films of different thickness were deposited. By adjusting it is found that when the thickness of the titanium films was in the nano-scale, the electric resistivity of the titanium films decreased. Furthermore, the deposited titanium was transformed into titanium oxide by maintain an oxygen atmosphere and using a rapid annealing furnace during sputtering. When oxidized nano titanium film is sputtered on a low-electric-resistive metal thin film, the photo-electronic properties of Nano-thin film will be enhanced.

Original languageEnglish
Title of host publicationApplied Science and Precision Engineering Innovation
Pages50-54
Number of pages5
DOIs
Publication statusPublished - 2014
EventInternational Applied Science and Precision Engineering Conference 2013, ASPEC 2013 - NanTou, Taiwan
Duration: 2013 Oct 182013 Oct 22

Publication series

NameApplied Mechanics and Materials
Volume479-480
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

OtherInternational Applied Science and Precision Engineering Conference 2013, ASPEC 2013
CountryTaiwan
CityNanTou
Period13-10-1813-10-22

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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