Abstract
The optical properties of an Er-implanted SiGe sample have been studied. Sharp and temperature-stable Er- related photoluminescence (PL) peaks were observed at around 1.5 jum, which correspond to the Er 4Ii3/2 to 4Iis/2 transition. It was found that the Er ions form more than three noncubic luminescence centers in the SiGe host. Although the PL intensity quenches at high temperatures, the Er-related PL signal can still be observed at room temperature. For a Sio.87Geo.i3-Er sample annealed at 850°C for 20 min, the activation energy is 130 meV which is slightly smaller than that of the Er-doped Si.
Original language | English |
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Pages (from-to) | 5633-5636 |
Number of pages | 4 |
Journal | Japanese journal of applied physics |
Volume | 34 |
Issue number | 10 |
DOIs | |
Publication status | Published - 1995 Oct |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)