Abstract
The present invention comprising the steps of: providing a flexible substrate; Forming a plurality of micro structure on a flexible substrate; Comprising the steps of coating the primary slag on the flexible substrate, the flexible substrate to form a light-shielding layer; And the light shielding layer The light-shielding layer including the step, and curing is a method for producing a photomask in a single layer.
Translated title of the contribution | 光罩及光罩的製造方法 |
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Original language | English |
Patent number | 10-1655035 |
Publication status | Published - 1800 |