Abstract
The present invention comprising the steps of: providing a flexible substrate; Forming a plurality of micro structure on a flexible substrate; Comprising the steps of coating the primary slag on the flexible substrate, the flexible substrate to form a light-shielding layer; And the light shielding layer The light-shielding layer including the step, and curing is a method for producing a photomask in a single layer.
| Translated title of the contribution | 光罩及光罩的製造方法 |
|---|---|
| Original language | English |
| Patent number | 10-1655035 |
| Publication status | Published - 1800 |