Physical and structural properties of RF magnetron sputtered ZnO films

Ren Chuan Chang, Sheng-Yuan Chu, Kuang-Yao Lo, Shih Chieh Lo, Yi Ren Huang

Research output: Contribution to journalConference article

9 Citations (Scopus)

Abstract

Poly-crystal zinc oxide thin films with c-axis orientation have been successfully grown on the silicon substrate by r.f. magnetron sputtering technique. A systematic study has been made of the influence of substrate temperature on the film structural and optical properties. For SAW device applications, it is necessary for ZnO films to have c-axis oriented crystalline structure. Much lower FWHM values 0.24° is obtained under the substrate temperature at 100°C for gaining effective electromechanical coupling. Crystalline structures, stress, and surface morphology characteristics of the films were investigated by X-ray diffraction, scanning electron microscopy. Reflective Second Harmonic Generation was used to analyze the quality of the ZnO film, and the results from these ZnO films coincide with the X-ray pattern and SEM image. Optical transmittance measurements were carried out by UV-visible spectrophotometer.

Original languageEnglish
Pages (from-to)43-53
Number of pages11
JournalIntegrated Ferroelectrics
Volume69
DOIs
Publication statusPublished - 2005 Jan 1
Event16th International Symposium on Integrated Ferroelectrics, ISIF-16 - Gyeongju, Korea, Republic of
Duration: 2004 Apr 52004 Apr 8

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Structural properties
Physical properties
physical properties
Substrates
Crystalline materials
Zinc Oxide
Scanning electron microscopy
scanning electron microscopy
Electromechanical coupling
Spectrophotometers
Opacity
Silicon
spectrophotometers
Harmonic generation
Full width at half maximum
Zinc oxide
Crystal orientation
zinc oxides
Magnetron sputtering
Oxide films

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Chang, Ren Chuan ; Chu, Sheng-Yuan ; Lo, Kuang-Yao ; Lo, Shih Chieh ; Huang, Yi Ren. / Physical and structural properties of RF magnetron sputtered ZnO films. In: Integrated Ferroelectrics. 2005 ; Vol. 69. pp. 43-53.
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Physical and structural properties of RF magnetron sputtered ZnO films. / Chang, Ren Chuan; Chu, Sheng-Yuan; Lo, Kuang-Yao; Lo, Shih Chieh; Huang, Yi Ren.

In: Integrated Ferroelectrics, Vol. 69, 01.01.2005, p. 43-53.

Research output: Contribution to journalConference article

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T1 - Physical and structural properties of RF magnetron sputtered ZnO films

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AU - Chu, Sheng-Yuan

AU - Lo, Kuang-Yao

AU - Lo, Shih Chieh

AU - Huang, Yi Ren

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AB - Poly-crystal zinc oxide thin films with c-axis orientation have been successfully grown on the silicon substrate by r.f. magnetron sputtering technique. A systematic study has been made of the influence of substrate temperature on the film structural and optical properties. For SAW device applications, it is necessary for ZnO films to have c-axis oriented crystalline structure. Much lower FWHM values 0.24° is obtained under the substrate temperature at 100°C for gaining effective electromechanical coupling. Crystalline structures, stress, and surface morphology characteristics of the films were investigated by X-ray diffraction, scanning electron microscopy. Reflective Second Harmonic Generation was used to analyze the quality of the ZnO film, and the results from these ZnO films coincide with the X-ray pattern and SEM image. Optical transmittance measurements were carried out by UV-visible spectrophotometer.

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