Piezoelectric actuator design with micro positioning capability and it's practical implementation

Fuzzy approach

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Due to the developments of precision industrial machineries, the microscale positioning ability for the relative apparatus requires small size and high accuracy, and the piezoelectric actuator is one of means has this feature hence piezoelectric actuator plays an important role in this field for its microscale movement ability. Unfortunately, the nonlinear hysteresis phenomenon of piezoelectric materials, and modeling uncertainties of piezoelectric actuators lead to control difficulties and strongly reduce the positioning accuracy of piezoelectric actuators. Based on the above reasons, a novel control design combined with feedback linearization, fuzzy modeling approximation, and robust control concept are proposed for dealing with the micrometer (μm) positioning problem of piezoelectric actuators. From the simulation results, it is obvious that our proposed control law yields the excellent control performance than the conventional control designs. Finally, this proposed method is practically performed for the verification of positioning performance. After the practical testing, the controlled piezoelectric actuator possesses a positioning accuracy of 1 μm.

Original languageEnglish
Title of host publicationiFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications
PublisherIEEE Computer Society
Pages19-24
Number of pages6
ISBN (Print)9781479903863
DOIs
Publication statusPublished - 2013 Jan 1
EventiFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications - Taipei, Taiwan
Duration: 2013 Dec 62013 Dec 8

Publication series

NameiFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications

Other

OtheriFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications
CountryTaiwan
CityTaipei
Period13-12-0613-12-08

Fingerprint

Piezoelectric Actuator
Piezoelectric actuators
Positioning
Control Design
Uncertainty Modeling
Piezoelectric Material
Feedback Linearization
Feedback linearization
Fuzzy Modeling
Piezoelectric materials
Robust control
Robust Control
Hysteresis
Design
High Accuracy
Testing
Approximation
Simulation

All Science Journal Classification (ASJC) codes

  • Applied Mathematics

Cite this

Chen, Y-Y. (2013). Piezoelectric actuator design with micro positioning capability and it's practical implementation: Fuzzy approach. In iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications (pp. 19-24). [6825403] (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications). IEEE Computer Society. https://doi.org/10.1109/iFuzzy.2013.6825403
Chen, Yung-Yu. / Piezoelectric actuator design with micro positioning capability and it's practical implementation : Fuzzy approach. iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications. IEEE Computer Society, 2013. pp. 19-24 (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications).
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abstract = "Due to the developments of precision industrial machineries, the microscale positioning ability for the relative apparatus requires small size and high accuracy, and the piezoelectric actuator is one of means has this feature hence piezoelectric actuator plays an important role in this field for its microscale movement ability. Unfortunately, the nonlinear hysteresis phenomenon of piezoelectric materials, and modeling uncertainties of piezoelectric actuators lead to control difficulties and strongly reduce the positioning accuracy of piezoelectric actuators. Based on the above reasons, a novel control design combined with feedback linearization, fuzzy modeling approximation, and robust control concept are proposed for dealing with the micrometer (μm) positioning problem of piezoelectric actuators. From the simulation results, it is obvious that our proposed control law yields the excellent control performance than the conventional control designs. Finally, this proposed method is practically performed for the verification of positioning performance. After the practical testing, the controlled piezoelectric actuator possesses a positioning accuracy of 1 μm.",
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Chen, Y-Y 2013, Piezoelectric actuator design with micro positioning capability and it's practical implementation: Fuzzy approach. in iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications., 6825403, iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications, IEEE Computer Society, pp. 19-24, iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications, Taipei, Taiwan, 13-12-06. https://doi.org/10.1109/iFuzzy.2013.6825403

Piezoelectric actuator design with micro positioning capability and it's practical implementation : Fuzzy approach. / Chen, Yung-Yu.

iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications. IEEE Computer Society, 2013. p. 19-24 6825403 (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chen Y-Y. Piezoelectric actuator design with micro positioning capability and it's practical implementation: Fuzzy approach. In iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications. IEEE Computer Society. 2013. p. 19-24. 6825403. (iFUZZY 2013 - 2013 International Conference on Fuzzy Theory and Its Applications). https://doi.org/10.1109/iFuzzy.2013.6825403