Plasma-driven system circuit design with asymmetrical pulsewidth modulation scheme

Fu Sheng Pai; Chung Lun Ou; Shyh Jier Huang

doi:10.1109/TIE.2010.2093482

Plasma-driven system circuit design with asymmetrical pulsewidth modulation scheme

Fu Sheng Pai, Chung Lun Ou, Shyh Jier Huang

Department of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

In this paper, the circuit design of a resonant inverter for plasma-driven system is studied. Based on the half-bridge inverter structure, the proposed circuit has included the soft-switching techniques so that the investment on heat dissipation can be greatly saved. Moreover, this paper has investigated plasma power control under different conditions. Via the developed control circuit to formulate the relationships between the output power and voltage as a quadratic function, the output power of the system can then be controlled and becomes insensitive to plasma voltage variations. In order to solidify the practicality of this circuit design, mathematical analyses and experimental validations have been thoroughly performed. Test results help confirm the effectiveness of the method, demonstrating its feasibility and practicality for high-frequency-drive industry applications.

Original language	English
Article number	5639074
Pages (from-to)	4167-4174
Number of pages	8
Journal	IEEE Transactions on Industrial Electronics
Volume	58
Issue number	9
DOIs	https://doi.org/10.1109/TIE.2010.2093482
Publication status	Published - 2011 Sep 1

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

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