TY - JOUR
T1 - Plasma-driven system circuit design with asymmetrical pulsewidth modulation scheme
AU - Pai, Fu Sheng
AU - Ou, Chung Lun
AU - Huang, Shyh Jier
N1 - Funding Information:
Manuscript received April 6, 2010; revised August 31, 2010; accepted October 20, 2010. Date of publication November 18, 2010; date of current version August 12, 2011. This work was supported in part by the Industrial Development Bureau, Ministry of Economic Affairs, Taipei, Taiwan, under Contract S09800226-198.
PY - 2011/9
Y1 - 2011/9
N2 - In this paper, the circuit design of a resonant inverter for plasma-driven system is studied. Based on the half-bridge inverter structure, the proposed circuit has included the soft-switching techniques so that the investment on heat dissipation can be greatly saved. Moreover, this paper has investigated plasma power control under different conditions. Via the developed control circuit to formulate the relationships between the output power and voltage as a quadratic function, the output power of the system can then be controlled and becomes insensitive to plasma voltage variations. In order to solidify the practicality of this circuit design, mathematical analyses and experimental validations have been thoroughly performed. Test results help confirm the effectiveness of the method, demonstrating its feasibility and practicality for high-frequency-drive industry applications.
AB - In this paper, the circuit design of a resonant inverter for plasma-driven system is studied. Based on the half-bridge inverter structure, the proposed circuit has included the soft-switching techniques so that the investment on heat dissipation can be greatly saved. Moreover, this paper has investigated plasma power control under different conditions. Via the developed control circuit to formulate the relationships between the output power and voltage as a quadratic function, the output power of the system can then be controlled and becomes insensitive to plasma voltage variations. In order to solidify the practicality of this circuit design, mathematical analyses and experimental validations have been thoroughly performed. Test results help confirm the effectiveness of the method, demonstrating its feasibility and practicality for high-frequency-drive industry applications.
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U2 - 10.1109/TIE.2010.2093482
DO - 10.1109/TIE.2010.2093482
M3 - Article
AN - SCOPUS:80051706696
VL - 58
SP - 4167
EP - 4174
JO - IEEE Transactions on Industrial Electronics
JF - IEEE Transactions on Industrial Electronics
SN - 0278-0046
IS - 9
M1 - 5639074
ER -