Post-annealing effect upon optical properties of electron beam evaporated molybdenum oxide thin films

Shih Yuan Lin; Ying Chung Chen; Chih Ming Wang; Po Tsung Hsieh; Shun Chou Shih

doi:10.1016/j.apsusc.2008.10.069

Post-annealing effect upon optical properties of electron beam evaporated molybdenum oxide thin films

Shih Yuan Lin, Ying Chung Chen, Chih Ming Wang, Po Tsung Hsieh, Shun Chou Shih

Center for Micro/Nano Science and Technology

Research output: Contribution to journal › Article › peer-review

77 Citations (Scopus)

Abstract

Molybdenum oxide (MoO ₃ ) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO ₃ thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO ₃ films can be obtained at various post-annealing temperatures from 200 to 500 °C in N ₂ and O ₂ . X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N ₂ was increased. The oxygen vacancies and conductivity of MoO ₃ film increased with the annealing temperature. However, when the MoO ₃ films were annealed in an atmosphere of O ₂ , the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N ₂ atmosphere.

Original language	English
Pages (from-to)	3868-3874
Number of pages	7
Journal	Applied Surface Science
Volume	255
Issue number	6
DOIs	https://doi.org/10.1016/j.apsusc.2008.10.069
Publication status	Published - 2009 Jan 1

All Science Journal Classification (ASJC) codes

General Chemistry
Condensed Matter Physics
General Physics and Astronomy
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2008.10.069

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@article{050e9dd7bb55422d8e8d7c60093f7000,

title = "Post-annealing effect upon optical properties of electron beam evaporated molybdenum oxide thin films",

abstract = " Molybdenum oxide (MoO 3 ) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO 3 thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO 3 films can be obtained at various post-annealing temperatures from 200 to 500 °C in N 2 and O 2 . X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N 2 was increased. The oxygen vacancies and conductivity of MoO 3 film increased with the annealing temperature. However, when the MoO 3 films were annealed in an atmosphere of O 2 , the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N 2 atmosphere.",

author = "Lin, {Shih Yuan} and Chen, {Ying Chung} and Wang, {Chih Ming} and Hsieh, {Po Tsung} and Shih, {Shun Chou}",

note = "Funding Information: This study was supported by the National Science Council of the Republic of China, Taiwan, under contract no. NSC 95-2221-E-230-010.",

year = "2009",

month = jan,

day = "1",

doi = "10.1016/j.apsusc.2008.10.069",

language = "English",

volume = "255",

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journal = "Applied Surface Science",

issn = "0169-4332",

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TY - JOUR

T1 - Post-annealing effect upon optical properties of electron beam evaporated molybdenum oxide thin films

AU - Lin, Shih Yuan

AU - Chen, Ying Chung

AU - Wang, Chih Ming

AU - Hsieh, Po Tsung

AU - Shih, Shun Chou

N1 - Funding Information: This study was supported by the National Science Council of the Republic of China, Taiwan, under contract no. NSC 95-2221-E-230-010.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - Molybdenum oxide (MoO 3 ) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO 3 thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO 3 films can be obtained at various post-annealing temperatures from 200 to 500 °C in N 2 and O 2 . X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N 2 was increased. The oxygen vacancies and conductivity of MoO 3 film increased with the annealing temperature. However, when the MoO 3 films were annealed in an atmosphere of O 2 , the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N 2 atmosphere.

AB - Molybdenum oxide (MoO 3 ) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO 3 thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO 3 films can be obtained at various post-annealing temperatures from 200 to 500 °C in N 2 and O 2 . X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N 2 was increased. The oxygen vacancies and conductivity of MoO 3 film increased with the annealing temperature. However, when the MoO 3 films were annealed in an atmosphere of O 2 , the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N 2 atmosphere.

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JO - Applied Surface Science

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Post-annealing effect upon optical properties of electron beam evaporated molybdenum oxide thin films

Abstract

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