TY - JOUR
T1 - Post-annealing effect upon optical properties of electron beam evaporated molybdenum oxide thin films
AU - Lin, Shih Yuan
AU - Chen, Ying Chung
AU - Wang, Chih Ming
AU - Hsieh, Po Tsung
AU - Shih, Shun Chou
N1 - Funding Information:
This study was supported by the National Science Council of the Republic of China, Taiwan, under contract no. NSC 95-2221-E-230-010.
PY - 2009/1/1
Y1 - 2009/1/1
N2 - Molybdenum oxide (MoO 3 ) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO 3 thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO 3 films can be obtained at various post-annealing temperatures from 200 to 500 °C in N 2 and O 2 . X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N 2 was increased. The oxygen vacancies and conductivity of MoO 3 film increased with the annealing temperature. However, when the MoO 3 films were annealed in an atmosphere of O 2 , the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N 2 atmosphere.
AB - Molybdenum oxide (MoO 3 ) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO 3 thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO 3 films can be obtained at various post-annealing temperatures from 200 to 500 °C in N 2 and O 2 . X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N 2 was increased. The oxygen vacancies and conductivity of MoO 3 film increased with the annealing temperature. However, when the MoO 3 films were annealed in an atmosphere of O 2 , the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N 2 atmosphere.
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U2 - 10.1016/j.apsusc.2008.10.069
DO - 10.1016/j.apsusc.2008.10.069
M3 - Article
AN - SCOPUS:57849128457
VL - 255
SP - 3868
EP - 3874
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - 6
ER -