Power MEMS and microengines

A. H. Epstein; S. D. Senturia; G. Anathasuresh; A. Ayon; K. Breuer; K. S. Chen; F. E. Ehrich; G. Gauba; R. Ghodssi; C. Groshenry; S. Jacobson; J. H. Lang; C. C. Lin; A. Mehra; J. M. Miranda; al et al

Power MEMS and microengines

A. H. Epstein, S. D. Senturia, G. Anathasuresh, A. Ayon, K. Breuer, K. S. Chen, F. E. Ehrich, G. Gauba, R. Ghodssi, C. Groshenry, S. Jacobson, J. H. Lang, C. C. Lin, A. Mehra, J. M. Miranda, al et al

Department of Mechanical Engineering

Research output: Contribution to conference › Paper › peer-review

182 Citations (Scopus)

Abstract

MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H₂. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

Original language	English
Pages	753-756
Number of pages	4
Publication status	Published - 1997
Event	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA Duration: 1997 Jun 16 → 1997 Jun 19

Other

Other	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
City	Chicago, IL, USA
Period	97-06-16 → 97-06-19

All Science Journal Classification (ASJC) codes

Engineering(all)

Cite this

Epstein, A. H., Senturia, S. D., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K. S., Ehrich, F. E., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Lang, J. H., Lin, C. C., Mehra, A., Miranda, J. M., & et al, A. (1997). Power MEMS and microengines. 753-756. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA.

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title = "Power MEMS and microengines",

abstract = "MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.",

author = "Epstein, {A. H.} and Senturia, {S. D.} and G. Anathasuresh and A. Ayon and K. Breuer and Chen, {K. S.} and Ehrich, {F. E.} and G. Gauba and R. Ghodssi and C. Groshenry and S. Jacobson and Lang, {J. H.} and Lin, {C. C.} and A. Mehra and Miranda, {J. M.} and {et al}, al",

year = "1997",

language = "English",

pages = "753--756",

note = "Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) ; Conference date: 16-06-1997 Through 19-06-1997",

}

Epstein, AH, Senturia, SD, Anathasuresh, G, Ayon, A, Breuer, K, Chen, KS, Ehrich, FE, Gauba, G, Ghodssi, R, Groshenry, C, Jacobson, S, Lang, JH, Lin, CC, Mehra, A, Miranda, JM & et al, A 1997, 'Power MEMS and microengines', Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, 97-06-16 - 97-06-19 pp. 753-756.

TY - CONF

T1 - Power MEMS and microengines

AU - Epstein, A. H.

AU - Senturia, S. D.

AU - Anathasuresh, G.

AU - Ayon, A.

AU - Breuer, K.

AU - Chen, K. S.

AU - Ehrich, F. E.

AU - Gauba, G.

AU - Ghodssi, R.

AU - Groshenry, C.

AU - Jacobson, S.

AU - Lang, J. H.

AU - Lin, C. C.

AU - Mehra, A.

AU - Miranda, J. M.

AU - et al, al

PY - 1997

Y1 - 1997

N2 - MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

AB - MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

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M3 - Paper

AN - SCOPUS:0030710904

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EP - 756

T2 - Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)

Y2 - 16 June 1997 through 19 June 1997

ER -

Power MEMS and microengines

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All Science Journal Classification (ASJC) codes

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