Power MEMS and microengines

A. H. Epstein, S. D. Senturia, G. Anathasuresh, A. Ayon, K. Breuer, K. S. Chen, F. E. Ehrich, G. Gauba, R. Ghodssi, C. Groshenry, S. Jacobson, J. H. Lang, C. C. Lin, A. Mehra, J. M. Miranda, al et al

Research output: Contribution to conferencePaperpeer-review

165 Citations (Scopus)

Abstract

MIT is developing a MEMS-based gas turbine generator. Based on high speed rotating machinery, this 1 cm diameter by 3 mm thick SiC heat engine is designed to produce 10-20 W of electric power while consuming 10 grams/hr of H2. Later versions may produce up to 100 W using hydrocarbon fuels. The combustor is now operating and an 80 W micro-turbine has been fabricated and is being tested. This engine can be considered the first of a new class of MEMS device, power MEMS, which are heat engines operating at power densities similar to those of the best large scale devices made today.

Original languageEnglish
Pages753-756
Number of pages4
Publication statusPublished - 1997
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period97-06-1697-06-19

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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