Precise autofocusing microscope with rapid response

Chien-Sheng Liu, Sheng Hong Jiang

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The rapid on-line or off-line automated vision inspection is a critical operation in the manufacturing fields. Accordingly, this present study designs and characterizes a novel precise optics-based autofocusing microscope with a rapid response and no reduction in the focusing accuracy. In contrast to conventional optics-based autofocusing microscopes with centroid method, the proposed microscope comprises a high-speed rotating optical diffuser in which the variation of the image centroid position is reduced and consequently the focusing response is improved. The proposed microscope is characterized and verified experimentally using a laboratory-built prototype. The experimental results show that compared to conventional optics-based autofocusing microscopes, the proposed microscope achieves a more rapid response with no reduction in the focusing accuracy. Consequently, the proposed microscope represents another solution for both existing and emerging industrial applications of automated vision inspection.

Original languageEnglish
Pages (from-to)294-300
Number of pages7
JournalOptics and Lasers in Engineering
Volume66
DOIs
Publication statusPublished - 2015 Jan 1

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Microscopes
microscopes
Optics
optics
centroids
inspection
Inspection
diffusers
Industrial applications
emerging
manufacturing
prototypes
high speed

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Mechanical Engineering

Cite this

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Precise autofocusing microscope with rapid response. / Liu, Chien-Sheng; Jiang, Sheng Hong.

In: Optics and Lasers in Engineering, Vol. 66, 01.01.2015, p. 294-300.

Research output: Contribution to journalArticle

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