Preliminary study of a dynamic-moving-window scheme for virtual-metrology model refreshing

Wei Ming Wu, Fan Tien Cheng, Min Hsiung Hung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations. Historical data is used to produce the initial VM models, and then these models are applied to operate in a process drift/shift environment. The accuracy of VM highly depends on the modeling samples adopted during initial-creating and on-line-refreshing periods. Since design-of-experiments (DOE) may not be performed due to large resources required, how could we guarantee stability of the models and predictions when they move into these unknown environments? Conventionally, static-moving-window (SMW) schemes with a fixed window size are adopted during the on-line-refreshing period. The purpose of this paper is to propose a dynamic-moving-window (DMW) scheme for VM model refreshing. The DMW scheme adds a new sample into the model and applies a clustering technology to do similarity clustering. Next, the number of elements in each cluster is checked. If the largest number of elements is greater than the predefined threshold, then the oldest sample in the cluster with the largest population is deleted. Test results show that the DMW scheme has better on-line conjecture accuracy than that of the SMW scheme.

Original languageEnglish
Title of host publication2012 IEEE International Conference on Robotics and Automation, ICRA 2012
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages5044-5049
Number of pages6
ISBN (Print)9781467314039
DOIs
Publication statusPublished - 2012 Jan 1
Event 2012 IEEE International Conference on Robotics and Automation, ICRA 2012 - Saint Paul, MN, United States
Duration: 2012 May 142012 May 18

Publication series

NameProceedings - IEEE International Conference on Robotics and Automation
ISSN (Print)1050-4729

Other

Other 2012 IEEE International Conference on Robotics and Automation, ICRA 2012
Country/TerritoryUnited States
CitySaint Paul, MN
Period12-05-1412-05-18

All Science Journal Classification (ASJC) codes

  • Software
  • Control and Systems Engineering
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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