TY - GEN
T1 - Preliminary study of run-to-run control utilizing virtual metrology with reliance index
AU - Kao, Chi An
AU - Cheng, Fan Tien
AU - Wu, Wei Ming
PY - 2011/12/5
Y1 - 2011/12/5
N2 - Incorporation of virtual metrology (VM) into run-to-run (R2R) control is one of key advanced process control (APC) focus areas of International Technology Roadmap for Semiconductors (ITRS) for 2009. However, a key problem preventing effective utilization of VM in R2R control is the inability to take the reliance level in the VM feedback loop of R2R control into consideration. The reason is that the result of adopting an unreliable VM value may be worse than if no VM at all is utilized. The authors have proposed the so-called reliance index (RI) of VM to gauge the reliability of the VM results. This paper proposes a novel scheme of run-to-run control that utilizes VM with RI in the feedback loop.
AB - Incorporation of virtual metrology (VM) into run-to-run (R2R) control is one of key advanced process control (APC) focus areas of International Technology Roadmap for Semiconductors (ITRS) for 2009. However, a key problem preventing effective utilization of VM in R2R control is the inability to take the reliance level in the VM feedback loop of R2R control into consideration. The reason is that the result of adopting an unreliable VM value may be worse than if no VM at all is utilized. The authors have proposed the so-called reliance index (RI) of VM to gauge the reliability of the VM results. This paper proposes a novel scheme of run-to-run control that utilizes VM with RI in the feedback loop.
UR - http://www.scopus.com/inward/record.url?scp=82455219045&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=82455219045&partnerID=8YFLogxK
U2 - 10.1109/CASE.2011.6042446
DO - 10.1109/CASE.2011.6042446
M3 - Conference contribution
AN - SCOPUS:82455219045
SN - 9781457717307
T3 - IEEE International Conference on Automation Science and Engineering
SP - 256
EP - 261
BT - 2011 IEEE International Conference on Automation Science and Engineering, CASE 2011
T2 - 2011 7th IEEE International Conference on Automation Science and Engineering, CASE 2011
Y2 - 24 August 2011 through 27 August 2011
ER -