Preliminary study of run-to-run control utilizing virtual metrology with reliance index

Chi An Kao, Fan Tien Cheng, Wei Ming Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

Incorporation of virtual metrology (VM) into run-to-run (R2R) control is one of key advanced process control (APC) focus areas of International Technology Roadmap for Semiconductors (ITRS) for 2009. However, a key problem preventing effective utilization of VM in R2R control is the inability to take the reliance level in the VM feedback loop of R2R control into consideration. The reason is that the result of adopting an unreliable VM value may be worse than if no VM at all is utilized. The authors have proposed the so-called reliance index (RI) of VM to gauge the reliability of the VM results. This paper proposes a novel scheme of run-to-run control that utilizes VM with RI in the feedback loop.

Original languageEnglish
Title of host publication2011 IEEE International Conference on Automation Science and Engineering, CASE 2011
Pages256-261
Number of pages6
DOIs
Publication statusPublished - 2011 Dec 5
Event2011 7th IEEE International Conference on Automation Science and Engineering, CASE 2011 - Trieste, Italy
Duration: 2011 Aug 242011 Aug 27

Publication series

NameIEEE International Conference on Automation Science and Engineering
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Other

Other2011 7th IEEE International Conference on Automation Science and Engineering, CASE 2011
CountryItaly
CityTrieste
Period11-08-2411-08-27

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Kao, C. A., Cheng, F. T., & Wu, W. M. (2011). Preliminary study of run-to-run control utilizing virtual metrology with reliance index. In 2011 IEEE International Conference on Automation Science and Engineering, CASE 2011 (pp. 256-261). [6042446] (IEEE International Conference on Automation Science and Engineering). https://doi.org/10.1109/CASE.2011.6042446