Preparation and characteristic of relative-humidity sensors based on laterally grown zno nanowires

Fu Shou Tsai, Shui Jinn Wang, Yung Chun Tu, Tseng Hsing Lin

Research output: Contribution to journalArticlepeer-review

Abstract

The use of laterally oriented zinc oxide nanowires (ZnO NWs) grown by a hydrothermal growth (HTG) method for relative-humidity (RH) sensing devices at room temperature (RT) is demonstrated. Sensing response under various RH conditions (12-96%) at RT is presented and discussed. A humidity sensor based on laterally oriented ZnO NWs with a sensing response (R12%=R96%) as high as 2.2 was obtained at RT. The RToperable humidity-sensing characteristics with comparably good sensitivity of the proposed humidity sensors is attributed to the full utilization of the entire NW surface, because the current path is aligned with the orientation of the bridged lateral ZnO NWs during the humidity sensing application, thus making possible.

Original languageEnglish
Article number06GG07
JournalJapanese journal of applied physics
Volume52
Issue number6 PART 2
DOIs
Publication statusPublished - 2013 Jun 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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