TY - GEN
T1 - Preparation and properties of a high temperature, flexible and colorless ITO coated polyimide substrate
AU - Li, Tung Lin
AU - Hsu, Steve Lien Chung
N1 - Funding Information:
The financial support provided by the National Science Council (Taiwan, ROC) through project NSC 95-2221-E-006-341 and the NCKU Project of Promoting Academic Excellence & Developing World Class Research Centers: D96-2700 is greatly appreciated. The authors also thank the Center for Micro/Nano Technology Research, National Cheng Kung University, Tainan, Taiwan, for equipment access and technical support.
PY - 2007
Y1 - 2007
N2 - By choosing appropriate monomers, we were able to synthesize a high temperature and colorless polyimide film. The ITO films were deposited on the polyimide film by the magne-tron-sputtering process to form flexible ITO coated plastic substrates. Due to the high Tg of the polyimide, the ITO film can be annealed at a temperature up to 250 °C to improve its electrooptical properties.
AB - By choosing appropriate monomers, we were able to synthesize a high temperature and colorless polyimide film. The ITO films were deposited on the polyimide film by the magne-tron-sputtering process to form flexible ITO coated plastic substrates. Due to the high Tg of the polyimide, the ITO film can be annealed at a temperature up to 250 °C to improve its electrooptical properties.
UR - https://www.scopus.com/pages/publications/47349088280
UR - https://www.scopus.com/pages/publications/47349088280#tab=citedBy
U2 - 10.1109/IMNC.2007.4456250
DO - 10.1109/IMNC.2007.4456250
M3 - Conference contribution
AN - SCOPUS:47349088280
SN - 4990247248
SN - 9784990247249
T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
SP - 354
EP - 355
BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Y2 - 5 November 2007 through 8 November 2007
ER -