Preparation of BaTiO3 thin film by hydrothermal electrochemical method

Masahiro Yoshimura, Seung Eul Yoo, Motoo Hayashi, Nobuo Ishizawa

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199 Citations (Scopus)

Abstract

BaTiO3 thin films have been prepared in situ on Ti metal substrates by a hydrothermal electrochemical technique, where a direct current has been passed between the anode, Ti plate, and the cathode, Pt plate, in high-temperature, high-pressure Ba2+ solutions. Dense thin films, 0.1∼0.3 μm thick, which consist of cubic BaTiO3 polycrystals without apparent pores or defects have been obtained under the following conditions: in 0.25∼0.5 N-Ba(OH)2 solutions above 100°C under saturated vapor pressures with the current density of 10∼100 mA/cm2 after 30∼80 min. These films are paraelectric with the dielectric constant of ≈300.

Original languageEnglish
Pages (from-to)L2007-L2009
JournalJapanese journal of applied physics
Volume28
Issue number11 A
DOIs
Publication statusPublished - 1989 Nov

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Physics and Astronomy

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