Preparation of heteroepitaxial LaNiO3 thin films on a SrTiO 3 substrate for growing an artificial superlattice with RF sputtering

Hsin Yi Lee, C. H. Hsu, Y. W. Hsieh, Yen Hua Chen, Yuan Chang Liang, Tai Bor Wu, L. J. Chou

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13 Citations (Scopus)


High-quality heteroepitaxial LaNiO3 (LNO) thin films were successfully grown on SrTiO3 (STO) substrates with RF-magnetron sputtering deposition at substrate temperatures in a range 150-650 °C. Azimuthal scans around the surface Bragg peak of the film and lattice images from a high-resolution transmission electron microscope (HRTEM) show that a well epitaxial relationship between film and substrate is achievable through RF sputtering growth. BaTiO3/SrTiO3 (BTO/STO) artificial superlattices subsequently deposited on LNO-coated STO substrates with RF sputtering were found also to have a large dielectric constant and a small dissipation factor.

Original languageEnglish
Pages (from-to)585-590
Number of pages6
JournalMaterials Chemistry and Physics
Issue number2-3
Publication statusPublished - 2005 Aug 15

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

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