Preparation of heteroepitaxial LaNiO3 thin films on a SrTiO 3 substrate for growing an artificial superlattice with RF sputtering

Hsin Yi Lee, C. H. Hsu, Y. W. Hsieh, Yen Hua Chen, Yuan Chang Liang, Tai Bor Wu, L. J. Chou

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

High-quality heteroepitaxial LaNiO3 (LNO) thin films were successfully grown on SrTiO3 (STO) substrates with RF-magnetron sputtering deposition at substrate temperatures in a range 150-650 °C. Azimuthal scans around the surface Bragg peak of the film and lattice images from a high-resolution transmission electron microscope (HRTEM) show that a well epitaxial relationship between film and substrate is achievable through RF sputtering growth. BaTiO3/SrTiO3 (BTO/STO) artificial superlattices subsequently deposited on LNO-coated STO substrates with RF sputtering were found also to have a large dielectric constant and a small dissipation factor.

Original languageEnglish
Pages (from-to)585-590
Number of pages6
JournalMaterials Chemistry and Physics
Volume92
Issue number2-3
DOIs
Publication statusPublished - 2005 Aug 15

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Preparation of heteroepitaxial LaNiO<sub>3</sub> thin films on a SrTiO <sub>3</sub> substrate for growing an artificial superlattice with RF sputtering'. Together they form a unique fingerprint.

Cite this