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Chemical Compounds
silicon tetrafluoride
Plasma enhanced chemical vapor deposition
Fluorine
Silicon
Leakage currents
X ray photoelectron spectroscopy
Flow rate
tetramethylsilane
Permittivity
Silanes
Refractive index
Fourier transform infrared spectroscopy
VLSI circuits
Fluorides
Stretching
Carbon Dioxide
Current density
Engineering & Materials Science
Plasma enhanced chemical vapor deposition
Fluorine
Leakage currents
Silicon
X ray photoelectron spectroscopy
Flow rate
Permittivity
Refractive index
Silanes
Fourier transform infrared spectroscopy
VLSI circuits
Stretching
Current density
Carbon dioxide
Physics & Astronomy
fluorine
leakage
vapor deposition
preparation
silicon
flow velocity
photoelectron spectroscopy
permittivity
very large scale integration
silanes
carbon dioxide
fluorides
infrared spectroscopy
x rays
current density
refractivity
requirements