Polycrystalline SrTiO3 thin films have been prepared on Timetal substrates by the hydrothermal‐electrochemical method. The films were prepared at temperatures ranging from 100° to 200°C and under saturated vapor pressures in electrolytic solutions of 1N to 5N Sr(OH)2. A galvanostat was used to apply a direct current of 5 to 25 mA/cm2. The films had smooth and homogeneous surfaces without any visible pores or defects. The dielectric constant of the films was approximately 129 assuming 25 nm for film thickness.
|Number of pages||3|
|Journal||Journal of the American Ceramic Society|
|Publication status||Published - 1990 Aug|
All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Materials Chemistry