Preparation of Strontium Titanate Thin Film on Titanium Metal Substrate by Hydrothermal‐Electrochemical Method

Seung Eul Yoo, Motoo Hayashi, Nobuo Ishizawa, Masahiro Yoshimura

Research output: Contribution to journalArticlepeer-review

69 Citations (Scopus)

Abstract

Polycrystalline SrTiO3 thin films have been prepared on Timetal substrates by the hydrothermal‐electrochemical method. The films were prepared at temperatures ranging from 100° to 200°C and under saturated vapor pressures in electrolytic solutions of 1N to 5N Sr(OH)2. A galvanostat was used to apply a direct current of 5 to 25 mA/cm2. The films had smooth and homogeneous surfaces without any visible pores or defects. The dielectric constant of the films was approximately 129 assuming 25 nm for film thickness.

Original languageEnglish
Pages (from-to)2561-2563
Number of pages3
JournalJournal of the American Ceramic Society
Volume73
Issue number8
DOIs
Publication statusPublished - 1990 Aug

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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