Abstract
Polycrystalline SrTiO3 thin films have been prepared on Timetal substrates by the hydrothermal‐electrochemical method. The films were prepared at temperatures ranging from 100° to 200°C and under saturated vapor pressures in electrolytic solutions of 1N to 5N Sr(OH)2. A galvanostat was used to apply a direct current of 5 to 25 mA/cm2. The films had smooth and homogeneous surfaces without any visible pores or defects. The dielectric constant of the films was approximately 129 assuming 25 nm for film thickness.
| Original language | English |
|---|---|
| Pages (from-to) | 2561-2563 |
| Number of pages | 3 |
| Journal | Journal of the American Ceramic Society |
| Volume | 73 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 1990 Aug |
All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Materials Chemistry