Preparing transparent conductive Sn/Sb-O 2 - X thin films by annealing bi-layer Sb/SnO 2 with pulse UV laser

Chun Min Wang, Chun Chieh Huang, Jui-Chao Kuo, Hao Tung Lin, Jow-Lay Huang

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Sb/SnO 2 bi-layer films were prepared on glass substrates using ion beam sputtering deposition (IBSD) and radio frequency (RF) magnetron sputtering deposition technology. The as-deposited bi-layer films were irradiated with a pulsed ultraviolet (UV) laser beam at 355 nm for the characteristic modulation which is expected to receive interest in the subtle transition. The effect of laser irradiation on the optical and electrical behavior and the chemical state of the films was investigated using X-ray photoelectron spectroscopy (XPS). The conductivity of Sb/SnO 2 after laser irradiation increased in comparison with that of SnO 2 and as-deposited Sb/SnO 2 thin films. The optical transmittance of laser irradiated Sb/SnO 2 increased from 41% to 47%.

Original languageEnglish
Pages (from-to)29-31
Number of pages3
JournalMaterials Letters
Volume72
DOIs
Publication statusPublished - 2012 Apr 1

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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