Preparing transparent conductive Sn/Sb-O 2 - X thin films by annealing bi-layer Sb/SnO 2 with pulse UV laser

Chun Min Wang; Chun Chieh Huang; Jui Chao Kuo; Hao Tung Lin; Jow Lay Huang

doi:10.1016/j.matlet.2011.12.031

Preparing transparent conductive Sn/Sb-O _{2 - X} thin films by annealing bi-layer Sb/SnO ₂ with pulse UV laser

Chun Min Wang, Chun Chieh Huang, Jui Chao Kuo, Hao Tung Lin, Jow Lay Huang

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Sb/SnO ₂ bi-layer films were prepared on glass substrates using ion beam sputtering deposition (IBSD) and radio frequency (RF) magnetron sputtering deposition technology. The as-deposited bi-layer films were irradiated with a pulsed ultraviolet (UV) laser beam at 355 nm for the characteristic modulation which is expected to receive interest in the subtle transition. The effect of laser irradiation on the optical and electrical behavior and the chemical state of the films was investigated using X-ray photoelectron spectroscopy (XPS). The conductivity of Sb/SnO ₂ after laser irradiation increased in comparison with that of SnO ₂ and as-deposited Sb/SnO ₂ thin films. The optical transmittance of laser irradiated Sb/SnO ₂ increased from 41% to 47%.

Original language	English
Pages (from-to)	29-31
Number of pages	3
Journal	Materials Letters
Volume	72
DOIs	https://doi.org/10.1016/j.matlet.2011.12.031
Publication status	Published - 2012 Apr 1

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/j.matlet.2011.12.031

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@article{0164901e9a544f1ca841d78aa0f20098,

title = "Preparing transparent conductive Sn/Sb-O 2 - X thin films by annealing bi-layer Sb/SnO 2 with pulse UV laser",

abstract = "Sb/SnO 2 bi-layer films were prepared on glass substrates using ion beam sputtering deposition (IBSD) and radio frequency (RF) magnetron sputtering deposition technology. The as-deposited bi-layer films were irradiated with a pulsed ultraviolet (UV) laser beam at 355 nm for the characteristic modulation which is expected to receive interest in the subtle transition. The effect of laser irradiation on the optical and electrical behavior and the chemical state of the films was investigated using X-ray photoelectron spectroscopy (XPS). The conductivity of Sb/SnO 2 after laser irradiation increased in comparison with that of SnO 2 and as-deposited Sb/SnO 2 thin films. The optical transmittance of laser irradiated Sb/SnO 2 increased from 41% to 47%.",

author = "Wang, {Chun Min} and Huang, {Chun Chieh} and Kuo, {Jui Chao} and Lin, {Hao Tung} and Huang, {Jow Lay}",

note = "Funding Information: The authors would like to thank the Department of Electrical Engineering, Cheng Shiu University for the helpful technical assistance of UV pulse laser apparatus. The project was financially supported by the National Science Council of Taiwan with grant No. 100-3113-E-006-004 .",

year = "2012",

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day = "1",

doi = "10.1016/j.matlet.2011.12.031",

language = "English",

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journal = "Materials Letters",

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T1 - Preparing transparent conductive Sn/Sb-O 2 - X thin films by annealing bi-layer Sb/SnO 2 with pulse UV laser

AU - Wang, Chun Min

AU - Huang, Chun Chieh

AU - Kuo, Jui Chao

AU - Lin, Hao Tung

AU - Huang, Jow Lay

N1 - Funding Information: The authors would like to thank the Department of Electrical Engineering, Cheng Shiu University for the helpful technical assistance of UV pulse laser apparatus. The project was financially supported by the National Science Council of Taiwan with grant No. 100-3113-E-006-004 .

PY - 2012/4/1

Y1 - 2012/4/1

N2 - Sb/SnO 2 bi-layer films were prepared on glass substrates using ion beam sputtering deposition (IBSD) and radio frequency (RF) magnetron sputtering deposition technology. The as-deposited bi-layer films were irradiated with a pulsed ultraviolet (UV) laser beam at 355 nm for the characteristic modulation which is expected to receive interest in the subtle transition. The effect of laser irradiation on the optical and electrical behavior and the chemical state of the films was investigated using X-ray photoelectron spectroscopy (XPS). The conductivity of Sb/SnO 2 after laser irradiation increased in comparison with that of SnO 2 and as-deposited Sb/SnO 2 thin films. The optical transmittance of laser irradiated Sb/SnO 2 increased from 41% to 47%.

AB - Sb/SnO 2 bi-layer films were prepared on glass substrates using ion beam sputtering deposition (IBSD) and radio frequency (RF) magnetron sputtering deposition technology. The as-deposited bi-layer films were irradiated with a pulsed ultraviolet (UV) laser beam at 355 nm for the characteristic modulation which is expected to receive interest in the subtle transition. The effect of laser irradiation on the optical and electrical behavior and the chemical state of the films was investigated using X-ray photoelectron spectroscopy (XPS). The conductivity of Sb/SnO 2 after laser irradiation increased in comparison with that of SnO 2 and as-deposited Sb/SnO 2 thin films. The optical transmittance of laser irradiated Sb/SnO 2 increased from 41% to 47%.

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DO - 10.1016/j.matlet.2011.12.031

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VL - 72

SP - 29

EP - 31

JO - Materials Letters

JF - Materials Letters

ER -

Preparing transparent conductive Sn/Sb-O _{2 - X} thin films by annealing bi-layer Sb/SnO ₂ with pulse UV laser

Abstract

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