Abstract
An integrated-optical three-color-mixing projection display system is demonstrated. This projection display system comprises an optical lens, two microscanners, and a 3 × 1 planar waveguide device using a new combination of SU-8 and JSR photoresists, which are suitable materials for rapid prototyping of integrated optical circuits. The three-color-mixer fabricated by using a low-cost process has been successfully used for color image generation. This study also demonstrates a surface micro-machined optical scanner using two stress-induced polysilicon plates to raise a horizontal mirror. The electrostatically driven mirror could be used for scanning projection display applications. Experimental data show that the optical scanner has a mirror scanning angle up to 18° using a low operating voltage of 25 V, a submillisecond switching time (< 600μs) and optical insertion loss of 0.85 dB is achieved for multimode waveguides. The development of the proposed project display technology could be promising for integrated optics.
Original language | English |
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Pages (from-to) | 217-219 |
Number of pages | 3 |
Journal | IEEE Photonics Technology Letters |
Volume | 17 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2005 Jan 1 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering