An integrated-optical three-color-mixing projection display system is demonstrated. This projection display system comprises an optical lens, two microscanners, and a 3 × 1 planar waveguide device using a new combination of SU-8 and JSR photoresists, which are suitable materials for rapid prototyping of integrated optical circuits. The three-color-mixer fabricated by using a low-cost process has been successfully used for color image generation. This study also demonstrates a surface micro-machined optical scanner using two stress-induced polysilicon plates to raise a horizontal mirror. The electrostatically driven mirror could be used for scanning projection display applications. Experimental data show that the optical scanner has a mirror scanning angle up to 18° using a low operating voltage of 25 V, a submillisecond switching time (< 600μs) and optical insertion loss of 0.85 dB is achieved for multimode waveguides. The development of the proposed project display technology could be promising for integrated optics.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering