Properties of ZnO-based love mode acoustic filters on 90° rotated ST-cut quartz substrates

Sheng-Yuan Chu, Walter Water, Jih Tsang Liaw

Research output: Contribution to journalArticle

Abstract

Love wave acoustic devices are very suitable for high frequency filters because of their high phase velocity. An experimental study of Love wave devices based on ZnO/90° rotated ST-cut quartz with different thickness of ZnO films is presented. ZnO films with c-axis orientated crystalline structure have been successfully grown on quartz by r.f. sputtering technique. Phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency have been studied as a function of layer thickness. In this research, ZnO/quartz structure based Love wave acoustic filter not only has higher phase velocity and bigger electromechanical coupling coefficient than quartz substrate, but also keeps the excellent temperature coefficient of frequency.

Original languageEnglish
Pages (from-to)113-119
Number of pages7
JournalIntegrated Ferroelectrics
Volume51
DOIs
Publication statusPublished - 2003 Dec 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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