TY - JOUR
T1 - Proton-exchanged wet etching of recessed-structure SAW filter
AU - Tsai, Shih Hung
AU - Wang, Na Fu
AU - Houng, Mau Phon
AU - Wang, Yeong Her
N1 - Funding Information:
Manuscript received February 18, 2003; accepted April 30, 2003. This work is supported by the National Science Council of the Republic of China under contract number: NSC91-2215-E-006-020.
PY - 2003/9
Y1 - 2003/9
N2 - An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.
AB - An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.
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U2 - 10.1109/TUFFC.2003.1235335
DO - 10.1109/TUFFC.2003.1235335
M3 - Letter
C2 - 14561040
AN - SCOPUS:0142007931
SN - 0885-3010
VL - 50
SP - 1219
EP - 1222
JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
IS - 9
ER -