Proton-exchanged wet etching of recessed-structure SAW filter

Shih Hung Tsai; Na Fu Wang; Mau Phon Houng; Yeong Her Wang

doi:10.1109/TUFFC.2003.1235335

Proton-exchanged wet etching of recessed-structure SAW filter

Shih Hung Tsai, Na Fu Wang, Mau Phon Houng, Yeong Her Wang

Research output: Contribution to journal › Letter › peer-review

1 Citation (Scopus)

Abstract

An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.

Original language	English
Pages (from-to)	1219-1222
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	50
Issue number	9
DOIs	https://doi.org/10.1109/TUFFC.2003.1235335
Publication status	Published - 2003 Sep

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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title = "Proton-exchanged wet etching of recessed-structure SAW filter",

abstract = "An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.",

author = "Tsai, {Shih Hung} and Wang, {Na Fu} and Houng, {Mau Phon} and Wang, {Yeong Her}",

note = "Funding Information: Manuscript received February 18, 2003; accepted April 30, 2003. This work is supported by the National Science Council of the Republic of China under contract number: NSC91-2215-E-006-020.",

year = "2003",

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doi = "10.1109/TUFFC.2003.1235335",

language = "English",

volume = "50",

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T1 - Proton-exchanged wet etching of recessed-structure SAW filter

AU - Tsai, Shih Hung

AU - Wang, Na Fu

AU - Houng, Mau Phon

AU - Wang, Yeong Her

N1 - Funding Information: Manuscript received February 18, 2003; accepted April 30, 2003. This work is supported by the National Science Council of the Republic of China under contract number: NSC91-2215-E-006-020.

PY - 2003/9

Y1 - 2003/9

N2 - An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.

AB - An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.

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JO - Transactions of the IRE Professional Group on Ultrasonic Engineering

JF - Transactions of the IRE Professional Group on Ultrasonic Engineering

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