Proton-exchanged wet etching of recessed-structure SAW filter

Shih Hung Tsai, Na Fu Wang, Mau Phon Houng, Yeong Her Wang

Research output: Contribution to journalLetterpeer-review

1 Citation (Scopus)

Abstract

An improved method for fabricating recessed-structure surface acoustic wave (SAW) filters is reported. The relation between proton-exchanged duration and etched depth are studied, as well as the relation between internal reflection, etched depth, and thickness of the aluminum electrode. Experimental results show that the devices have superior performance, and ideas for further improvement of the fabricated SAW device are discussed.

Original languageEnglish
Pages (from-to)1219-1222
Number of pages4
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume50
Issue number9
DOIs
Publication statusPublished - 2003 Sep

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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