Protrusive detection for thin film transistor-liquid crystal display using side-view illumination

Fu Ming Tzu, Jung-Hua Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Protrusion adhered onto the glass substrate of the thin-film transistor liquid crystal display (TFT-LCD) is a yield killer to damage the valuable photo-mask frequently. An innovative method using side-view illuminations associated with digital charge couple devices (CCDs) to detect the protrusion for color filter panel of the black matrix (BM) film and photo resistance (PR) red (R), green (G), and blue (B) film balls of TFT-LCD is developed in this study. Between the photo-mask and glass substrate, the gap is 300μm; the height of the protrusive of the species at 280μm, 277μm, 256μm and 265μm are simulated on the inspection platform. The method indicates the significant detect of the protrusion that reaches to 300um and even lower than 200um. The maximum error of the measurement is within 6% among of species. Furthermore the uncertainty analysis of 3-standard deviation are at 23μm, 15μm 18μm and 20μm with respect to BM, R, G and B filmed glass balls. Thus, the method is a cost effective inspection to prevent the damage for valuable photo-mask in TFT-LCD's industry.

Original languageEnglish
Title of host publication11th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2016 - Proceedings
PublisherIEEE Computer Society
Pages416-419
Number of pages4
ISBN (Electronic)9781509047697
DOIs
Publication statusPublished - 2016 Dec 27
Event11th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2016 - Taipei, Taiwan
Duration: 2016 Oct 262016 Oct 28

Publication series

NameProceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
ISSN (Print)2150-5934
ISSN (Electronic)2150-5942

Other

Other11th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2016
CountryTaiwan
CityTaipei
Period16-10-2616-10-28

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Tzu, F. M., & Chou, J-H. (2016). Protrusive detection for thin film transistor-liquid crystal display using side-view illumination. In 11th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2016 - Proceedings (pp. 416-419). [7800054] (Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT). IEEE Computer Society. https://doi.org/10.1109/IMPACT.2016.7800054