Pull-in voltage estimation of microcantilever beams with effects of residual stress gradients and capacitance fringing

Kuang Shun Ou; Kuo Shen Chen

doi:10.1109/TDMR.2013.2279891

Pull-in voltage estimation of microcantilever beams with effects of residual stress gradients and capacitance fringing

Kuang Shun Ou, Kuo Shen Chen

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Pull-in characteristics of microcantilevers subjected to both residual stress gradients and electrostatic fringing are investigated by extending the previous JMEMS work by Ou using an energy approach. The analysis results agree with those performed by finite-element simulation very well. Finally, a semi-analytical engineering formula is also presented for MEMS design engineers.

Original language	English
Article number	6587523
Pages (from-to)	577-579
Number of pages	3
Journal	IEEE Transactions on Device and Materials Reliability
Volume	14
Issue number	1
DOIs	https://doi.org/10.1109/TDMR.2013.2279891
Publication status	Published - 2014 Mar

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Safety, Risk, Reliability and Quality
Electrical and Electronic Engineering

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10.1109/TDMR.2013.2279891

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abstract = "Pull-in characteristics of microcantilevers subjected to both residual stress gradients and electrostatic fringing are investigated by extending the previous JMEMS work by Ou using an energy approach. The analysis results agree with those performed by finite-element simulation very well. Finally, a semi-analytical engineering formula is also presented for MEMS design engineers.",

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Pull-in voltage estimation of microcantilever beams with effects of residual stress gradients and capacitance fringing

Abstract

All Science Journal Classification (ASJC) codes

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