Pyroelectric Ta-modified LiNbO3 thin films and devices for thermal infrared detection

M. C. Kao, H. Z. Chen, S. L. Yang, Y. C. Chen, P. T. Hsieh, C. C. Yu

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12 Citations (Scopus)


High-performance pyroelectric infrared (IR) detectors have been fabricated using tantalate-doped lithium niobate LiNb1 - xTaxO3 (abbreviated as LNT, with x = 0-1.0) thin films deposited on Pt(111)/Ti/SiO2/Si(100) substrates by diol-based sol-gel processing, in which, tantalate (Ta) is adopted as dopant in lithium niobate. The randomly oriented LNT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient. The pyroelectric characteristics of detectors with various tantalate contents, as a function of modulation frequency, were investigated. It was found that LiNb0.8Ta0.2O3 had the largest voltage responsivity of 7020 (V/W) at 70 Hz, and a specific detectivity (D*) of 7.76 × 107 cm Hz1/2/W at 200 Hz. These results indicate that the LNT thin film with x = 0.20 is most suitable for application as high-performance pyroelectric thin-film detectors.

Original languageEnglish
Pages (from-to)5518-5522
Number of pages5
JournalThin Solid Films
Issue number16
Publication statusPublished - 2008 Jun 30

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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