Quantitative characterization of self-assembled coherent islands

Chuan Pu Liu, J. Murray Gibson

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


We report on plan-view transmission electron microscopy techniques, by which the size, the actual shape and the strain of a coherent island in semiconductor heterostructures can be measured accurately. The bright-field suppressed-diffraction imaging condition where no strong diffracted beam is excited in the sample provides reliable size measurement as well as the detailed shape and aspect ratio. An exact two-beam diffraction condition is employed to produce the strain contrast of a coherent island and the corresponding fringes can be easily utilized to measure the average strain relaxation occurring during island evolution. We also propose an off-axis z contrast technique for the unambiguous determination of composition profile in an island. Finally examples of application of these techniques on the characterization of Ge coherent islands on Si(1 0 0) substrates are demonstrated.

Original languageEnglish
Pages (from-to)2-8
Number of pages7
JournalThin Solid Films
Issue number1
Publication statusPublished - 2003 Jan 22
Eventproceedings of the 1st Ineternational Conference on Materials - Singapore, Singapore
Duration: 2001 Jul 12001 Jul 6

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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