Quantitative characterization of self-assembled coherent islands

Chuan-Pu Liu, J. Murray Gibson

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

We report on plan-view transmission electron microscopy techniques, by which the size, the actual shape and the strain of a coherent island in semiconductor heterostructures can be measured accurately. The bright-field suppressed-diffraction imaging condition where no strong diffracted beam is excited in the sample provides reliable size measurement as well as the detailed shape and aspect ratio. An exact two-beam diffraction condition is employed to produce the strain contrast of a coherent island and the corresponding fringes can be easily utilized to measure the average strain relaxation occurring during island evolution. We also propose an off-axis z contrast technique for the unambiguous determination of composition profile in an island. Finally examples of application of these techniques on the characterization of Ge coherent islands on Si(1 0 0) substrates are demonstrated.

Original languageEnglish
Pages (from-to)2-8
Number of pages7
JournalThin Solid Films
Volume424
Issue number1
DOIs
Publication statusPublished - 2003 Jan 22
Eventproceedings of the 1st Ineternational Conference on Materials - Singapore, Singapore
Duration: 2001 Jul 12001 Jul 6

Fingerprint

Diffraction
Strain relaxation
Heterojunctions
Aspect ratio
Semiconductor materials
Transmission electron microscopy
Imaging techniques
Substrates
Chemical analysis
diffraction
aspect ratio
transmission electron microscopy
profiles

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

Liu, Chuan-Pu ; Gibson, J. Murray. / Quantitative characterization of self-assembled coherent islands. In: Thin Solid Films. 2003 ; Vol. 424, No. 1. pp. 2-8.
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Quantitative characterization of self-assembled coherent islands. / Liu, Chuan-Pu; Gibson, J. Murray.

In: Thin Solid Films, Vol. 424, No. 1, 22.01.2003, p. 2-8.

Research output: Contribution to journalConference article

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