This paper gives a comprehensive review on the advances in the field of scanning evanescent microwave microscopy, as a high-throughput characterization tool for electrical properties. Theoretical model analyses used for performing quantitative non-destructive characterization of various materials are presented. Examples of applications of the microwave microscopy to the rapid measurements of dielectric/ferroelectric libraries are given.
All Science Journal Classification (ASJC) codes
- Engineering (miscellaneous)
- Applied Mathematics