Quantitative scanning evanescent microwave microscopy and its applications in characterization of functional materials libraries

Chen Gao; Bo Hu; I. Takeuchi; Kao Shuo Chang; Xiao Dong Xiang; Gang Wang

doi:10.1088/0957-0233/16/1/033

Quantitative scanning evanescent microwave microscopy and its applications in characterization of functional materials libraries

Chen Gao, Bo Hu, I. Takeuchi, Kao Shuo Chang, Xiao Dong Xiang, Gang Wang

Research output: Contribution to journal › Review article › peer-review

71 Citations (Scopus)

Abstract

This paper gives a comprehensive review on the advances in the field of scanning evanescent microwave microscopy, as a high-throughput characterization tool for electrical properties. Theoretical model analyses used for performing quantitative non-destructive characterization of various materials are presented. Examples of applications of the microwave microscopy to the rapid measurements of dielectric/ferroelectric libraries are given.

Original language	English
Pages (from-to)	248-260
Number of pages	13
Journal	Measurement Science and Technology
Volume	16
Issue number	1
DOIs	https://doi.org/10.1088/0957-0233/16/1/033
Publication status	Published - 2005 Jan

All Science Journal Classification (ASJC) codes

Instrumentation
Engineering (miscellaneous)
Applied Mathematics

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10.1088/0957-0233/16/1/033

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abstract = "This paper gives a comprehensive review on the advances in the field of scanning evanescent microwave microscopy, as a high-throughput characterization tool for electrical properties. Theoretical model analyses used for performing quantitative non-destructive characterization of various materials are presented. Examples of applications of the microwave microscopy to the rapid measurements of dielectric/ferroelectric libraries are given.",

author = "Chen Gao and Bo Hu and I. Takeuchi and Chang, {Kao Shuo} and Xiang, {Xiao Dong} and Gang Wang",

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Quantitative scanning evanescent microwave microscopy and its applications in characterization of functional materials libraries

Abstract

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