Abstract
This paper gives a comprehensive review on the advances in the field of scanning evanescent microwave microscopy, as a high-throughput characterization tool for electrical properties. Theoretical model analyses used for performing quantitative non-destructive characterization of various materials are presented. Examples of applications of the microwave microscopy to the rapid measurements of dielectric/ferroelectric libraries are given.
| Original language | English |
|---|---|
| Pages (from-to) | 248-260 |
| Number of pages | 13 |
| Journal | Measurement Science and Technology |
| Volume | 16 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2005 Jan |
All Science Journal Classification (ASJC) codes
- Instrumentation
- Engineering (miscellaneous)
- Applied Mathematics
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