@inproceedings{7d8bf0c94af04393a8b6b90e83a8cb3e,
title = "Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications",
abstract = "This article investigates a thin-film bulk acoustic-wave resonator (TFBAR) based on Li-doped ZnO (LZO) film. The LZO thin-film is deposited by radio frequency (RF) magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The microstructural and chemical evolutions via various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (12.66 pC/N) of the LZO film is obtained after 90 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, the fabricated TFBAR exhibits a high quality factor (Q = 1358) at ∼500 MHz and a good sensitivity under several relative humidity levels (30∼90% at room temperature in a standard atmosphere). The experimental results verify the LZO-based TFBAR is a candidate for humidity sensor applications.",
author = "Lin, {Chun Cheng} and Lin, {Chun Ting} and Chu, {Sheng Yuan}",
year = "2018",
month = jun,
day = "22",
doi = "10.1109/ISNE.2018.8394629",
language = "English",
series = "Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--4",
booktitle = "Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018",
address = "United States",
note = "7th International Symposium on Next-Generation Electronics, ISNE 2018 ; Conference date: 07-05-2018 Through 09-05-2018",
}