Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications

Chun Cheng Lin, Chun Ting Lin, Sheng-Yuan Chu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This article investigates a thin-film bulk acoustic-wave resonator (TFBAR) based on Li-doped ZnO (LZO) film. The LZO thin-film is deposited by radio frequency (RF) magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The microstructural and chemical evolutions via various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (12.66 pC/N) of the LZO film is obtained after 90 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, the fabricated TFBAR exhibits a high quality factor (Q = 1358) at ∼500 MHz and a good sensitivity under several relative humidity levels (30∼90% at room temperature in a standard atmosphere). The experimental results verify the LZO-based TFBAR is a candidate for humidity sensor applications.

Original languageEnglish
Title of host publicationProceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538614457
DOIs
Publication statusPublished - 2018 Jun 22
Event7th International Symposium on Next-Generation Electronics, ISNE 2018 - Taipei, Taiwan
Duration: 2018 May 72018 May 9

Publication series

NameProceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018

Other

Other7th International Symposium on Next-Generation Electronics, ISNE 2018
CountryTaiwan
CityTaipei
Period18-05-0718-05-09

Fingerprint

Humidity sensors
Magnetron sputtering
humidity
Resonators
radio frequencies
magnetron sputtering
resonators
Acoustic waves
Thin films
acoustics
Lighting
Ozone
illumination
sensors
thin films
ozone
reference atmospheres
chemical evolution
Crystallization
Q factors

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Lin, C. C., Lin, C. T., & Chu, S-Y. (2018). Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications. In Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018 (pp. 1-4). (Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISNE.2018.8394629
Lin, Chun Cheng ; Lin, Chun Ting ; Chu, Sheng-Yuan. / Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications. Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-4 (Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018).
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abstract = "This article investigates a thin-film bulk acoustic-wave resonator (TFBAR) based on Li-doped ZnO (LZO) film. The LZO thin-film is deposited by radio frequency (RF) magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The microstructural and chemical evolutions via various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (12.66 pC/N) of the LZO film is obtained after 90 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, the fabricated TFBAR exhibits a high quality factor (Q = 1358) at ∼500 MHz and a good sensitivity under several relative humidity levels (30∼90{\%} at room temperature in a standard atmosphere). The experimental results verify the LZO-based TFBAR is a candidate for humidity sensor applications.",
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Lin, CC, Lin, CT & Chu, S-Y 2018, Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications. in Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018. Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018, Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 7th International Symposium on Next-Generation Electronics, ISNE 2018, Taipei, Taiwan, 18-05-07. https://doi.org/10.1109/ISNE.2018.8394629

Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications. / Lin, Chun Cheng; Lin, Chun Ting; Chu, Sheng-Yuan.

Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-4 (Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lin CC, Lin CT, Chu S-Y. Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications. In Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-4. (Proceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018). https://doi.org/10.1109/ISNE.2018.8394629