Radio-frequency magnetron sputtering deposited ZnO-based TFBAR for humidity sensor applications

Chun Cheng Lin, Chun Ting Lin, Sheng Yuan Chu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This article investigates a thin-film bulk acoustic-wave resonator (TFBAR) based on Li-doped ZnO (LZO) film. The LZO thin-film is deposited by radio frequency (RF) magnetron sputtering system and post-treated with ultraviolet (UV)-ozone illumination. The microstructural and chemical evolutions via various illumination times of the predominantly c-axis orientation LZO films are investigated. The largest piezoelectric coefficient (12.66 pC/N) of the LZO film is obtained after 90 min UV-ozone illumination, which can be ascribed to better crystallization and fewer oxygen-related defects. Furthermore, the fabricated TFBAR exhibits a high quality factor (Q = 1358) at ∼500 MHz and a good sensitivity under several relative humidity levels (30∼90% at room temperature in a standard atmosphere). The experimental results verify the LZO-based TFBAR is a candidate for humidity sensor applications.

Original languageEnglish
Title of host publicationProceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538614457
DOIs
Publication statusPublished - 2018 Jun 22
Event7th International Symposium on Next-Generation Electronics, ISNE 2018 - Taipei, Taiwan
Duration: 2018 May 72018 May 9

Publication series

NameProceedings - 2018 7th International Symposium on Next-Generation Electronics, ISNE 2018

Other

Other7th International Symposium on Next-Generation Electronics, ISNE 2018
CountryTaiwan
CityTaipei
Period18-05-0718-05-09

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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