Radio-frequency microdischarge arrays for large-area cold atmospheric plasma generation

Yoou Bin Guo, Franklin Chau Nan Hong

Research output: Contribution to journalArticlepeer-review

54 Citations (Scopus)

Abstract

Radio-frequency microdischarge arrays for large-area cold atmospheric plasma generation were discussed. Gases flowed through arrays of microhollow cathode holes. Results showed that radio-frequency microhollow cathode discharges have lower ignition voltages and higher plasma stability and atmospheric plasma process is suitable for low coat plasma processing.

Original languageEnglish
Pages (from-to)337-339
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number3
DOIs
Publication statusPublished - 2003 Jan 20

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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