Rapid fabrication of microfluidic chip on PMMA substrate by CO 2 laser

Ting Fu Hong, Wei Jhong Ju, Jik Chang Leong, Chiu Feng Lin, Chien Hsiung Tsai, Lung-Ming Fu

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents a widely available CO 2 laser scriber to perform the direct-writing ablation of poly(methyl methacrylate) (PMMA) substrate for the development of microfluidic chips. The surface quality of the ablated microchannels and the presence of debris and distortion were examined by scanning electron microscopy, atomic force microscopy and surface profile measurement techniques. The developed laser ablation system provides a versatile and economic approach for the fabrication of microfluidic chips on PMMA substrate. In the laser writing process, the desired microfluidic patterns are designed using commercial computer software and are then transferred to the laser scriber to ablate the trenches. The results show that a very smooth channel wall with surface roughness less than 4 nm can be achieved through the unfocusing fabrication method without any annealing process. The machining capability and versatility of the laser writing system are demonstrated through its application to the microfluidic chips fabrication on PMMA substrate.

Original languageEnglish
Pages (from-to)351-354
Number of pages4
JournalNami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume7
Issue number4
Publication statusPublished - 2009 Jul 1

Fingerprint

Polymethyl methacrylates
Microfluidics
polymethyl methacrylate
chips
Fabrication
fabrication
Lasers
Substrates
lasers
Surface measurement
Laser ablation
versatility
Ablation
microchannels
Microchannels
debris
Debris
machining
laser ablation
ablation

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Hong, Ting Fu ; Ju, Wei Jhong ; Leong, Jik Chang ; Lin, Chiu Feng ; Tsai, Chien Hsiung ; Fu, Lung-Ming. / Rapid fabrication of microfluidic chip on PMMA substrate by CO 2 laser. In: Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering. 2009 ; Vol. 7, No. 4. pp. 351-354.
@article{50d9b4845d0e46eaa0d56b95420a6810,
title = "Rapid fabrication of microfluidic chip on PMMA substrate by CO 2 laser",
abstract = "This paper presents a widely available CO 2 laser scriber to perform the direct-writing ablation of poly(methyl methacrylate) (PMMA) substrate for the development of microfluidic chips. The surface quality of the ablated microchannels and the presence of debris and distortion were examined by scanning electron microscopy, atomic force microscopy and surface profile measurement techniques. The developed laser ablation system provides a versatile and economic approach for the fabrication of microfluidic chips on PMMA substrate. In the laser writing process, the desired microfluidic patterns are designed using commercial computer software and are then transferred to the laser scriber to ablate the trenches. The results show that a very smooth channel wall with surface roughness less than 4 nm can be achieved through the unfocusing fabrication method without any annealing process. The machining capability and versatility of the laser writing system are demonstrated through its application to the microfluidic chips fabrication on PMMA substrate.",
author = "Hong, {Ting Fu} and Ju, {Wei Jhong} and Leong, {Jik Chang} and Lin, {Chiu Feng} and Tsai, {Chien Hsiung} and Lung-Ming Fu",
year = "2009",
month = "7",
day = "1",
language = "English",
volume = "7",
pages = "351--354",
journal = "Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering",
issn = "1672-6030",
publisher = "Editorial Office of Nanotechnology and Precision Engineering",
number = "4",

}

Rapid fabrication of microfluidic chip on PMMA substrate by CO 2 laser. / Hong, Ting Fu; Ju, Wei Jhong; Leong, Jik Chang; Lin, Chiu Feng; Tsai, Chien Hsiung; Fu, Lung-Ming.

In: Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering, Vol. 7, No. 4, 01.07.2009, p. 351-354.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Rapid fabrication of microfluidic chip on PMMA substrate by CO 2 laser

AU - Hong, Ting Fu

AU - Ju, Wei Jhong

AU - Leong, Jik Chang

AU - Lin, Chiu Feng

AU - Tsai, Chien Hsiung

AU - Fu, Lung-Ming

PY - 2009/7/1

Y1 - 2009/7/1

N2 - This paper presents a widely available CO 2 laser scriber to perform the direct-writing ablation of poly(methyl methacrylate) (PMMA) substrate for the development of microfluidic chips. The surface quality of the ablated microchannels and the presence of debris and distortion were examined by scanning electron microscopy, atomic force microscopy and surface profile measurement techniques. The developed laser ablation system provides a versatile and economic approach for the fabrication of microfluidic chips on PMMA substrate. In the laser writing process, the desired microfluidic patterns are designed using commercial computer software and are then transferred to the laser scriber to ablate the trenches. The results show that a very smooth channel wall with surface roughness less than 4 nm can be achieved through the unfocusing fabrication method without any annealing process. The machining capability and versatility of the laser writing system are demonstrated through its application to the microfluidic chips fabrication on PMMA substrate.

AB - This paper presents a widely available CO 2 laser scriber to perform the direct-writing ablation of poly(methyl methacrylate) (PMMA) substrate for the development of microfluidic chips. The surface quality of the ablated microchannels and the presence of debris and distortion were examined by scanning electron microscopy, atomic force microscopy and surface profile measurement techniques. The developed laser ablation system provides a versatile and economic approach for the fabrication of microfluidic chips on PMMA substrate. In the laser writing process, the desired microfluidic patterns are designed using commercial computer software and are then transferred to the laser scriber to ablate the trenches. The results show that a very smooth channel wall with surface roughness less than 4 nm can be achieved through the unfocusing fabrication method without any annealing process. The machining capability and versatility of the laser writing system are demonstrated through its application to the microfluidic chips fabrication on PMMA substrate.

UR - http://www.scopus.com/inward/record.url?scp=69249208760&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=69249208760&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:69249208760

VL - 7

SP - 351

EP - 354

JO - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

JF - Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering

SN - 1672-6030

IS - 4

ER -