Rapid, one-step thermolysis synthesis of large-scaled molybdenum disulfide thin films with high mobility

Tai Yu Wu, Li Wen Wang, Jia Hao Wang, Bo Chun Chen, Sheng Yuan Chu

Research output: Contribution to journalArticlepeer-review

Abstract

In this study, a simple and rapid method for the synthesis of molybdenum disulfide (MoS2) through thermolysis was demonstrated. In the previous reported work, the thermolysis synthesis of MoS2 usually required a two-step process. The process is time-consuming, and need high-temperature (900 °C). In this study, we synthesize large-area thin films quickly in a single step at 450 °C using both hydrogen gas and sulfur powders for synthesis and defect filling at the same time. The layer number of MoS2 films, controlled by the precursor concentration, is determined to be between 3 and 10 layers via Raman spectroscopy and TEM analysis. XPS analysis revealed the optimal amount of sulfur powders for vacancy refilling, and films prepared with this amount exhibited high carrier mobility of up to 220 cm2/Vs. According to the author's knowledge, the carrier mobility of proposed samples is much higher than that of the reported data.

Original languageEnglish
Pages (from-to)7970-7977
Number of pages8
JournalCeramics International
Volume50
Issue number5
DOIs
Publication statusPublished - 2024 Mar 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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