Re-poling process for piezoelectric-based multilayer ceramic capacitors force sensor

Keng Ren Lin, Chih Han Chang, Cheng Hung Chiang, Che Hsin Lin

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9 Citations (Scopus)

Abstract

This study presents an industrial-grade piezoelectric-based multilayer ceramic capacitors (MLCCs) force sensor. In order to increase the sensitivity and reduce the variation of different MLCCs, a simple re-poling process is adopted by applying an external electric field at the Curie temperature of MLCCs. Results indicate that the re-poling treatment improved up to 100-fold for the force detection sensitivity and reduced the variation for the output force response by 10-fold in comparison with the MLCC sensors without re-poling.

Original languageEnglish
Article number142904
JournalApplied Physics Letters
Volume102
Issue number14
DOIs
Publication statusPublished - 2013 Apr 8

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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