This study presents an industrial-grade piezoelectric-based multilayer ceramic capacitors (MLCCs) force sensor. In order to increase the sensitivity and reduce the variation of different MLCCs, a simple re-poling process is adopted by applying an external electric field at the Curie temperature of MLCCs. Results indicate that the re-poling treatment improved up to 100-fold for the force detection sensitivity and reduced the variation for the output force response by 10-fold in comparison with the MLCC sensors without re-poling.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)