Fingerprint
Dive into the research topics of 'Reaction mechanisms in both a CHF3/O2/Ar and CHF3/H2/Ar radio frequency plasma environment'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Reaction mechanisms in both a CHF3/O2/Ar and CHF3/H2/Ar radio frequency plasma environment
Ya Fen Wang, Wen Jhy Lee, Chuh Yung Chen, Lien Te Hsieh
Research output: Contribution to journal › Article › peer-review
29
Citations
(Scopus)