Reactive magnetron sputter-deposited TiNxOy multilayered solar selective coatings

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12 Citations (Scopus)


In this work, we have investigated multilayer structures in which TiNx as an IR reflector on the substrate due to its high infrared reflectivity, TiNxOy coatings serve as the solar absorbers, and a bi-layer N-doped TiO2/SiO2 or HfO2 layer for surface anti-reflection. Both the TiNx and TiNxOy layers were first optimized. Selected TiNx and TiNxOy layers were then used to fabricate the multilayered structures. Optical properties were assessed at room temperature and high temperatures up to 800 °C. While the multilayered structures having bi-layer N-doped TiO2/SiO2 as the anti-reflection layer show excellent absorption and emission up to 600 °C, much reduced absorption where obtained at 800 °C. The use of HfO2 layer to replace SiO2 improves the absorption at 800 °C. The relationship between material characteristics and optical performance, which has not been understood, is addressed in this study. Excellent high temperature selectivity is demonstrated.

Original languageEnglish
Pages (from-to)178-186
Number of pages9
JournalSolar Energy
Publication statusPublished - 2019 Mar 15

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Materials Science(all)


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