TY - JOUR
T1 - Reactively co-sputter deposited a-C:H/Cr thin films
T2 - Material characteristics and optical properties
AU - Cheng, Hsin Yen
AU - Chiou, Jau Wern
AU - Ting, Jyh Ming
AU - Tzeng, Yonhua
N1 - Funding Information:
This work was supported by the National Science Council in Taiwan under grant no. NSC-99-2120-M-006-004 . The use of equipments in the National Chung Hsing University and National Tsing Hua University is also appreciated.
Copyright:
Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2013/2/1
Y1 - 2013/2/1
N2 - Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8%. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 C were determined using UV-vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.
AB - Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8%. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 C were determined using UV-vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.
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U2 - 10.1016/j.tsf.2012.10.025
DO - 10.1016/j.tsf.2012.10.025
M3 - Article
AN - SCOPUS:84873742917
VL - 529
SP - 164
EP - 168
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
ER -