Reactively co-sputter deposited a-C:H/Cr thin films

Material characteristics and optical properties

Hsin Yen Cheng, Jau Wern Chiou, Jyh-Ming Ting, Yon-Hua Tzeng

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8%. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 C were determined using UV-vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.

Original languageEnglish
Pages (from-to)164-168
Number of pages5
JournalThin Solid Films
Volume529
DOIs
Publication statusPublished - 2013 Feb 1

Fingerprint

mass spectrometers
Optical properties
coatings
optical properties
Thin films
Coatings
absorptance
Sputter deposition
Methane
Mass spectrometers
Chromium
Silicon
thin films
High resolution transmission electron microscopy
emittance
Spectrometry
spectroscopy
Copper
chromium
absorbers

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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title = "Reactively co-sputter deposited a-C:H/Cr thin films: Material characteristics and optical properties",
abstract = "Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8{\%}. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 C were determined using UV-vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.",
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Reactively co-sputter deposited a-C:H/Cr thin films : Material characteristics and optical properties. / Cheng, Hsin Yen; Chiou, Jau Wern; Ting, Jyh-Ming; Tzeng, Yon-Hua.

In: Thin Solid Films, Vol. 529, 01.02.2013, p. 164-168.

Research output: Contribution to journalArticle

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AU - Cheng, Hsin Yen

AU - Chiou, Jau Wern

AU - Ting, Jyh-Ming

AU - Tzeng, Yon-Hua

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