Abstract
Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8%. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 C were determined using UV-vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 164-168 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 529 |
| DOIs | |
| Publication status | Published - 2013 Feb 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
Cite this
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Reactively co-sputter deposited a-C:H/Cr thin films : Material characteristics and optical properties. / Cheng, Hsin Yen; Chiou, Jau Wern; Ting, Jyh-Ming; Tzeng, Yon-Hua.
In: Thin Solid Films, Vol. 529, 01.02.2013, p. 164-168.Research output: Contribution to journal › Article
TY - JOUR
T1 - Reactively co-sputter deposited a-C:H/Cr thin films
T2 - Material characteristics and optical properties
AU - Cheng, Hsin Yen
AU - Chiou, Jau Wern
AU - Ting, Jyh-Ming
AU - Tzeng, Yon-Hua
PY - 2013/2/1
Y1 - 2013/2/1
N2 - Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8%. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 C were determined using UV-vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.
AB - Various chromium-containing amorphous hydrogenated carbon (a-C:H/Cr) coatings were deposited on oxygen-free copper and silicon substrates for use as solar selective absorber coatings. The deposition was performed using a magnetron co-sputter deposition method under various methane/Ar ratios, ranging from 0 to 8%. The obtained films were characterized using glazing incident X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, secondary ion mass spectrometer, and X-ray photoelectron spectroscopy. The optical absorptance and emittance at 100 C were determined using UV-vis-NIR spectroscopy and Fourier transform infrared spectrometry, respectively. Effects of the material characteristics on the optical properties are reported and discussed.
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UR - http://www.scopus.com/inward/citedby.url?scp=84873742917&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2012.10.025
DO - 10.1016/j.tsf.2012.10.025
M3 - Article
VL - 529
SP - 164
EP - 168
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
ER -