Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by: In situ transmission electron microscopy

Feng Chun Hsia, Dai Ming Tang, Wipakorn Jevasuwan, Naoki Fukata, Xin Zhou, Masanori Mitome, Yoshio Bando, Torbjörn E.M. Nordling, Dmitri Golberg

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Mechanical resonators have wide applications in sensing bio-chemical substances, and provide an accurate method to measure the intrinsic elastic properties of oscillating materials. A high resonance order with high response frequency and a small resonator mass are critical for enhancing the sensitivity and precision. Here, we report on the realization and direct observation of high-order and high-frequency silicon nanowire (Si NW) resonators. By using an oscillating electric-field for inducing a mechanical resonance of single-crystalline Si NWs inside a transmission electron microscope (TEM), we observed resonance up to the 5th order, for both normal and parametric modes at ∼100 MHz frequencies. The precision of the resonant frequency was enhanced, as the deviation reduced from 3.14% at the 1st order to 0.25% at the 5th order, correlating with the increase of energy dissipation. The elastic modulus of Si NWs was measured to be ∼169 GPa in the [110] direction, and size scaling effects were found to be absent down to the ∼20 nm level.

Original languageEnglish
Pages (from-to)1784-1790
Number of pages7
JournalNanoscale Advances
Volume1
Issue number5
DOIs
Publication statusPublished - 2019 Jan 1

Fingerprint

Silicon
Nanowires
Resonators
nanowires
resonators
Transmission electron microscopy
transmission electron microscopy
silicon
critical mass
resonant vibration
frequency response
Frequency response
resonant frequencies
Natural frequencies
Energy dissipation
modulus of elasticity
Electron microscopes
elastic properties
electron microscopes
energy dissipation

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Bioengineering
  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Chemistry(all)

Cite this

Hsia, Feng Chun ; Tang, Dai Ming ; Jevasuwan, Wipakorn ; Fukata, Naoki ; Zhou, Xin ; Mitome, Masanori ; Bando, Yoshio ; Nordling, Torbjörn E.M. ; Golberg, Dmitri. / Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by : In situ transmission electron microscopy. In: Nanoscale Advances. 2019 ; Vol. 1, No. 5. pp. 1784-1790.
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Realization and direct observation of five normal and parametric modes in silicon nanowire resonators by : In situ transmission electron microscopy. / Hsia, Feng Chun; Tang, Dai Ming; Jevasuwan, Wipakorn; Fukata, Naoki; Zhou, Xin; Mitome, Masanori; Bando, Yoshio; Nordling, Torbjörn E.M.; Golberg, Dmitri.

In: Nanoscale Advances, Vol. 1, No. 5, 01.01.2019, p. 1784-1790.

Research output: Contribution to journalArticle

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T2 - In situ transmission electron microscopy

AU - Hsia, Feng Chun

AU - Tang, Dai Ming

AU - Jevasuwan, Wipakorn

AU - Fukata, Naoki

AU - Zhou, Xin

AU - Mitome, Masanori

AU - Bando, Yoshio

AU - Nordling, Torbjörn E.M.

AU - Golberg, Dmitri

PY - 2019/1/1

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