In our study, we spun a negative photoresist layer on top of a plasmonic lens which was formed by adopting a metallic ring structure with a nano-scale width opening. We recorded the beam shape of the Bessel-like beam emitting from the plasmonic lens which formed a high aspect ratio structure. We found that the high aspect ratio structure was higher after exposure as the inner and outer diameter had increased. In addition, we used an oblique incidence on the negative resist metallic ring structure to produce an inclined micro-structure. Different exposure results were obtained with the two different metal thicknesses. Therefore, in our study, we not only proved that it is possible to record the shape of a Bessel-like beam, but we also demonstrated that it is possible to create a plasmonic lens which is capable of creating a high aspect ratio structure through exposure.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics