Recycle of synthetic calcium fluoride and waste sulfuric acid to produce electronic grade hydrofluoric acid

Min Fa Lin, Jhong Lin Wu, Ken Lin Chang, Wen Jhy Lee, Chih Ping Chang, Yung Chang Lin, Po Han Chen

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


An innovative method for utilizing synthetic calcium fluoride (CaF2), recovered from fluoride-containing semiconductor wastewater, and waste sulfuric acid (H2SO4) to produce hydrofluoric acid (HF) was investigated. The research was set to study the low-temperature production of HF via reaction of synthetic CaF2 and waste H2SO4. The impact of four factors, including H2SO4 concentration, total volume (H2SO4 + H2O)/CaF2 ratio, drying temperature of synthetic CaF2, and reaction carried out under different temperature, on HF productivity was investigated in this study. HF yield increased with increasing H2SO4 concentration and total volume/CaF2 ratio under room temperature. Generally, reactions carried out under low-temperature (< 100 °C) had a positive impact on HF yield. The higher temperature led to an increase in absorbed-HF but a decrease in total-HF. The reaction of commercial CaF2 and 70% H2SO4 had a higher absorbed-HF yield of 61.7% than synthetic CaF2 and 70% waste H2SO4, which had a yield of 36%. This was due to the higher purity of the commercial CaF2 and fewer interference ions in H2SO4. HF productivity was lowered by CaSO4, which hindered the reaction of reactants and also the generation of fluorosulfuric acid.

Original languageEnglish
Pages (from-to)40633-40639
Number of pages7
JournalEnvironmental Science and Pollution Research
Issue number30
Publication statusPublished - 2021 Aug

All Science Journal Classification (ASJC) codes

  • Environmental Chemistry
  • Pollution
  • Health, Toxicology and Mutagenesis


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