Reflection high energy electron diffraction study of CoSi₂/Si multilayer structures

Engineering & Materials Science

• Reflection high energy electron diffraction 100%
• Diffraction patterns 69%
• Multilayers 46%
• Heterojunctions 42%
• Rutherford backscattering spectroscopy 30%
• Epitaxial growth 22%
• Crystallinity 19%
• Transmission electron microscopy 16%
• Annealing 16%
• Silicon 12%
• Microstructure 10%
• Hot Temperature 7%
• Temperature 6%
• Experiments 5%

Physics & Astronomy

• high energy electrons 48%
• laminates 45%
• electron diffraction 41%
• diffraction patterns 40%
• epitaxy 15%
• solid phases 15%
• backscattering 14%
• crystallinity 14%
• transmission electron microscopy 10%
• annealing 9%
• microstructure 9%
• room temperature 8%
• silicon 8%
• spectroscopy 8%

Chemical Compounds

• Reflection High Energy Electron Diffraction 78%
• Solid Phase Epitaxy 31%
• Rutherford Backscattering Spectroscopy 20%
• Liquid Film 15%
• Annealing 12%
• Crystallinity 12%
• Microstructure 10%
• Transmission Electron Microscopy 10%
• Ambient Reaction Temperature 9%