Reinforcement of a poly(dimethyl siloxane) mold with high aspect ratio microstructures via a gas-liquid phase sol-gel process

Zih Jian Jheng, Yan Chao Fang, Kuo Feng Lo, Yi-Je Juang

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A gas-liquid phase sol-gel process was proposed to reinforce a poly(dimethyl siloxane) (PDMS) mold with high aspect ratio microstructures (HARMs) for micromolding. Unlike the conventional sol-gel process or in situ precipitation of silicate nanoparticles (SiO2) inside the PDMS network, the vapor of water and aminomethyl propanol-95 permeated through the PDMS which was pre-soaked with tetraethoxy silane (TEOS), leading to the occurrence of hydrolysis and condensation and reinforcement of the PDMS. The reinforced PDMS mold with HARMs was used for micromolding, and high replication accuracy was achieved. The proposed technique not only prevents the surface of microstructures on the mold from potential agglomeration of particles but also allows for the repetitive usage of the silicon mother mold without damage.

Original languageEnglish
Article number045016
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number4
DOIs
Publication statusPublished - 2009 Aug 4

Fingerprint

Siloxanes
Sol-gel process
Aspect ratio
Reinforcement
Gases
Microstructure
Liquids
Propanol
Silanes
Silicates
Condensation
Hydrolysis
Agglomeration
Vapors
Nanoparticles
Steam
Silicon
Water

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

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abstract = "A gas-liquid phase sol-gel process was proposed to reinforce a poly(dimethyl siloxane) (PDMS) mold with high aspect ratio microstructures (HARMs) for micromolding. Unlike the conventional sol-gel process or in situ precipitation of silicate nanoparticles (SiO2) inside the PDMS network, the vapor of water and aminomethyl propanol-95 permeated through the PDMS which was pre-soaked with tetraethoxy silane (TEOS), leading to the occurrence of hydrolysis and condensation and reinforcement of the PDMS. The reinforced PDMS mold with HARMs was used for micromolding, and high replication accuracy was achieved. The proposed technique not only prevents the surface of microstructures on the mold from potential agglomeration of particles but also allows for the repetitive usage of the silicon mother mold without damage.",
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Reinforcement of a poly(dimethyl siloxane) mold with high aspect ratio microstructures via a gas-liquid phase sol-gel process. / Jheng, Zih Jian; Fang, Yan Chao; Lo, Kuo Feng; Juang, Yi-Je.

In: Journal of Micromechanics and Microengineering, Vol. 19, No. 4, 045016, 04.08.2009.

Research output: Contribution to journalArticle

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AU - Jheng, Zih Jian

AU - Fang, Yan Chao

AU - Lo, Kuo Feng

AU - Juang, Yi-Je

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AB - A gas-liquid phase sol-gel process was proposed to reinforce a poly(dimethyl siloxane) (PDMS) mold with high aspect ratio microstructures (HARMs) for micromolding. Unlike the conventional sol-gel process or in situ precipitation of silicate nanoparticles (SiO2) inside the PDMS network, the vapor of water and aminomethyl propanol-95 permeated through the PDMS which was pre-soaked with tetraethoxy silane (TEOS), leading to the occurrence of hydrolysis and condensation and reinforcement of the PDMS. The reinforced PDMS mold with HARMs was used for micromolding, and high replication accuracy was achieved. The proposed technique not only prevents the surface of microstructures on the mold from potential agglomeration of particles but also allows for the repetitive usage of the silicon mother mold without damage.

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