TY - JOUR
T1 - Residual-layer-free printing by selective filling of self-assembled monolayer-treated mold
AU - Hong, Franklin Chau Nan
AU - Kao, Yu Chih
N1 - Funding Information:
The authors gratefully acknowledge the support for this work from National Science Council, Taiwan under the Grant No. NSC-97-2221-E-006-123-MY3 and the Ministry of Economic Affairs (Taiwan, ROC) through Project Nos. 98-EC-17-A-01-S2-0065 and 98-D0204-2. They are also thankful for the support from the United Microelectronics Corporation, Project No. 94S154. Furthermore, they appreciate the experimental assistance from Jun-Yang Sie and Chiao-Yang Cheng.
Copyright:
Copyright 2015 Elsevier B.V., All rights reserved.
PY - 2011/7
Y1 - 2011/7
N2 - In this study, the authors achieved residual-layer-free printing by reversal imprint with the grooves or cavities of the mold selectively filled with polymer. By treating the protrusion surface and groove surface of the mold with alkylsilane and fluoroalkylsilane self-assembled-monolayers (SAMs), respectively, the polymer solution could selectively fill the grooves or cavities of the mold by spin coating, with no deposition on the protrusion surface. By stamping the selectively filled mold on the substrate, residual-layer-free patterns of polymer could be obtained. The residual-layer-free printing could simplify the fabrication of micron-scale three-dimensional structures with smooth edges and low distortion. The solvent in the polymer solution for spin coating of the mold plays an important role in the selective filling. The mechanism of selective filling was found to be further induced by the dynamic adhesion of the polymer solution to the SAM-treated surfaces.
AB - In this study, the authors achieved residual-layer-free printing by reversal imprint with the grooves or cavities of the mold selectively filled with polymer. By treating the protrusion surface and groove surface of the mold with alkylsilane and fluoroalkylsilane self-assembled-monolayers (SAMs), respectively, the polymer solution could selectively fill the grooves or cavities of the mold by spin coating, with no deposition on the protrusion surface. By stamping the selectively filled mold on the substrate, residual-layer-free patterns of polymer could be obtained. The residual-layer-free printing could simplify the fabrication of micron-scale three-dimensional structures with smooth edges and low distortion. The solvent in the polymer solution for spin coating of the mold plays an important role in the selective filling. The mechanism of selective filling was found to be further induced by the dynamic adhesion of the polymer solution to the SAM-treated surfaces.
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U2 - 10.1116/1.3596558
DO - 10.1116/1.3596558
M3 - Article
AN - SCOPUS:80051860353
VL - 29
JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SN - 2166-2746
IS - 4
M1 - 041601
ER -