Residual-layer-free printing by selective filling of self-assembled monolayer-treated mold

Franklin Chau Nan Hong, Yu Chih Kao

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

In this study, the authors achieved residual-layer-free printing by reversal imprint with the grooves or cavities of the mold selectively filled with polymer. By treating the protrusion surface and groove surface of the mold with alkylsilane and fluoroalkylsilane self-assembled-monolayers (SAMs), respectively, the polymer solution could selectively fill the grooves or cavities of the mold by spin coating, with no deposition on the protrusion surface. By stamping the selectively filled mold on the substrate, residual-layer-free patterns of polymer could be obtained. The residual-layer-free printing could simplify the fabrication of micron-scale three-dimensional structures with smooth edges and low distortion. The solvent in the polymer solution for spin coating of the mold plays an important role in the selective filling. The mechanism of selective filling was found to be further induced by the dynamic adhesion of the polymer solution to the SAM-treated surfaces.

Original languageEnglish
Article number041601
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume29
Issue number4
DOIs
Publication statusPublished - 2011 Jul

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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