Resistive switching characteristics of sputtered AlN thin films

Zong Liang Tseng, Lung Chien Chen, Wan Ying Li, Sheng Yuan Chu

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


AlN thin films were deposited on Pt/Ti/SiO2/Si substrates using a radio-frequency magnetron sputtering technique. The effect on the switch current-voltage characteristics of four different materials in the electrode fabricated on top of the AlN film was investigated. The deposition time and nitrogen content in the sputtering atmosphere were changed to adjust the thickness and composition of the AlN thin films, respectively. The influence of film thickness and content on the resistive switching behavior was discussed. The possible mechanism of resistive switching was examined via analyses of the electrical resistive switching characteristics, forming voltage, and on/off current ratio.

Original languageEnglish
Pages (from-to)9496-9503
Number of pages8
JournalCeramics International
Issue number8
Publication statusPublished - 2016 Jun 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry


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