Respiration detection chip with integrated temperature-insensitive MEMS sensors and CMOS signal processing circuits

Chia Ling Wei, Yu Chen Lin, Tse An Chen, Ren Yi Lin, Tin Hao Liu

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

An airflow sensing chip, which integrates MEMS sensors with their CMOS signal processing circuits into a single chip, is proposed for respiration detection. Three micro-cantilever-based airflow sensors were designed and fabricated using a 0.35 \mum CMOS/MEMS 2P4M mixed-signal polycide process. Two main differences were present among these three designs: they were either metal-covered or metal-free structures, and had either bridge-type or fixed-type reference resistors. The performances of these sensors were measured and compared, including temperature sensitivity and airflow sensitivity. Based on the measured results, the metal-free structure with fixed-type reference resistors is recommended for use, because it has the highest airflow sensitivity and also can effectively reduce the output voltage drift caused by temperature change.

Original languageEnglish
Article number6839056
Pages (from-to)105-112
Number of pages8
JournalIEEE Transactions on Biomedical Circuits and Systems
Volume9
Issue number1
DOIs
Publication statusPublished - 2015 Feb 1

All Science Journal Classification (ASJC) codes

  • Biomedical Engineering
  • Electrical and Electronic Engineering

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